Investigation of Transferred-Arc Cleaning for Thin Film Removal

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Transferred-arc cleaning is being investigated as a precision cleaning method for thin films on electrically conducting substrates as well as the traditional cleaning and roughening pretreatment for LPPS. Transferred-arc cleaning of copper substrates has been studied to identify the effect of processing conditions on cleaning and roughening characteristics. A Box-Behnken response surface design experiment varying the chamber pressure, substrate standoff distance, and torch current while observing the transferred arc voltage, voltage fluctuation, current, emitted light, and surface cleanliness was performed. The result of the analysis show the effect of the various independent variables on the measured responses. Distinct stages in ... continued below

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Hollis, K.; Castro, R.G. & Bartram, B. March 17, 1998.

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Transferred-arc cleaning is being investigated as a precision cleaning method for thin films on electrically conducting substrates as well as the traditional cleaning and roughening pretreatment for LPPS. Transferred-arc cleaning of copper substrates has been studied to identify the effect of processing conditions on cleaning and roughening characteristics. A Box-Behnken response surface design experiment varying the chamber pressure, substrate standoff distance, and torch current while observing the transferred arc voltage, voltage fluctuation, current, emitted light, and surface cleanliness was performed. The result of the analysis show the effect of the various independent variables on the measured responses. Distinct stages in the cleaning process are identified by their sample cleanliness, voltage level, voltage fluctuation, emitted light, and erosion rate.

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Medium: P; Size: vp.

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OSTI as DE00759786

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  • United Thermal Spray Conference, Dusseldorf (DE), 03/17/1998--03/19/1998

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  • Report No.: LA-UR-98-4509
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 759786
  • Archival Resource Key: ark:/67531/metadc708348

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  • March 17, 1998

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  • Sept. 12, 2015, 6:31 a.m.

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  • May 6, 2016, 1:31 p.m.

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Hollis, K.; Castro, R.G. & Bartram, B. Investigation of Transferred-Arc Cleaning for Thin Film Removal, article, March 17, 1998; New Mexico. (digital.library.unt.edu/ark:/67531/metadc708348/: accessed August 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.