Two-dimensional Green`s function Poisson solution appropriate for feature-scale microelectronics simulations

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Description

This report describes the numerical procedure used to implement the Green`s function method for solving the Poisson equation in two-dimensional Cartesian coordinates. The procedure can determine the solution to a problem with any or all of applied voltage boundary conditions, dielectric media, floating (insulated) conducting media, dielectric surface charging, periodic (reflective) boundary conditions, and volumetric space charge. The numerical solution is reasonably fast, and the dimension of the linear problem to be solved is that of the number of elements needed to represent the surfaces, not the whole computational volume. The method of solution is useful in the simulation of ... continued below

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56 p.

Creation Information

Riley, M.E. March 1, 1998.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 27 times . More information about this report can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This report describes the numerical procedure used to implement the Green`s function method for solving the Poisson equation in two-dimensional Cartesian coordinates. The procedure can determine the solution to a problem with any or all of applied voltage boundary conditions, dielectric media, floating (insulated) conducting media, dielectric surface charging, periodic (reflective) boundary conditions, and volumetric space charge. The numerical solution is reasonably fast, and the dimension of the linear problem to be solved is that of the number of elements needed to represent the surfaces, not the whole computational volume. The method of solution is useful in the simulation of plasma particle motion in the vicinity of complex surface structures as found in microelectronics plasma processing applications. A FORTRAN implementation of this procedure is available from the author.

Physical Description

56 p.

Notes

OSTI as DE98004182

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  • Other Information: PBD: Mar 1998

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  • Other: DE98004182
  • Report No.: SAND--98-0537
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/650153 | External Link
  • Office of Scientific & Technical Information Report Number: 650153
  • Archival Resource Key: ark:/67531/metadc707388

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • March 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 14, 2016, 7:12 p.m.

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Riley, M.E. Two-dimensional Green`s function Poisson solution appropriate for feature-scale microelectronics simulations, report, March 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc707388/: accessed December 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.