Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology

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Description

A new 5-level polysilicon surface micromachine process has been developed that offers significantly increased system complexity, while further promoting the manufacturability and reliability of microscopic mechanical systems. In general, as complexity increases, reliability suffers. This is not necessarily the case, however, with MicroElectroMechanical Systems (MEMS). In fact, utilizing additional levels of polysilicon in structures can greatly increase yield, reliability, and robustness. Surface micromachine devices are built thousands at a time using the infrastructure developed to support the incredibly reliable microelectronics industry, and the batch fabrication process utilized in the 5-level technology further increases reliability and reduces cost by totally eliminating ... continued below

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6 p.

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Rodgers, M.S. & Sniegowski, J.J. May 1, 1998.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A new 5-level polysilicon surface micromachine process has been developed that offers significantly increased system complexity, while further promoting the manufacturability and reliability of microscopic mechanical systems. In general, as complexity increases, reliability suffers. This is not necessarily the case, however, with MicroElectroMechanical Systems (MEMS). In fact, utilizing additional levels of polysilicon in structures can greatly increase yield, reliability, and robustness. Surface micromachine devices are built thousands at a time using the infrastructure developed to support the incredibly reliable microelectronics industry, and the batch fabrication process utilized in the 5-level technology further increases reliability and reduces cost by totally eliminating post assembly.

Physical Description

6 p.

Notes

OSTI as DE98005710

Source

  • 2. international conference on engineering design and automation, Maui, HI (United States), 9-12 Aug 1998

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  • Other: DE98005710
  • Report No.: SAND--98-0393C
  • Report No.: CONF-980810--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 672074
  • Archival Resource Key: ark:/67531/metadc706807

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • May 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • May 5, 2016, 8:27 p.m.

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Rodgers, M.S. & Sniegowski, J.J. Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology, article, May 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc706807/: accessed October 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.