Shape reversal of Ge/Si domes to pyramids via Si-Ge intermixing and strain reduction

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At 650 C, Si freely intermixes with Ge in the dome islands causing a reduction in the strain of the islands and an increase in island size. The shape reversal of Ge/Si domes to pyramids is investigated by analysis of the strain and size changes that occur on an island by island basis. This was carried out for anneal times of 0, 20, 40 and 60 minutes. Transition islands were observed consistent with previous work, which are partially domes and partially pyramids. These islands demonstrated a strain gradient, having a slightly lower strain on the side that has transformed to ... continued below

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10 p.

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Henstrom, W. L.; Liu, C.-P. & Gibson, J. M. February 16, 2000.

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  • Argonne National Laboratory
    Publisher Info: Argonne National Laboratory, Argonne, IL (United States)
    Place of Publication: Argonne, Illinois

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Description

At 650 C, Si freely intermixes with Ge in the dome islands causing a reduction in the strain of the islands and an increase in island size. The shape reversal of Ge/Si domes to pyramids is investigated by analysis of the strain and size changes that occur on an island by island basis. This was carried out for anneal times of 0, 20, 40 and 60 minutes. Transition islands were observed consistent with previous work, which are partially domes and partially pyramids. These islands demonstrated a strain gradient, having a slightly lower strain on the side that has transformed to a pyramid. Cross-sectional STEM was then used to show that this strain gradient is associated with a non-uniform Si intermixing in the islands.

Physical Description

10 p.

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OSTI as DE00751912

Medium: P; Size: 10 pages

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  • MRS '99 Fall Meeting, Boston, MA (US), 11/29/1999--12/03/1999

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  • Report No.: ANL/MSD/CP-101079
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 751912
  • Archival Resource Key: ark:/67531/metadc706724

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Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • February 16, 2000

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 6, 2017, 7:05 p.m.

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Henstrom, W. L.; Liu, C.-P. & Gibson, J. M. Shape reversal of Ge/Si domes to pyramids via Si-Ge intermixing and strain reduction, article, February 16, 2000; Argonne, Illinois. (digital.library.unt.edu/ark:/67531/metadc706724/: accessed October 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.