The integration of surface micromachined devices with optoelectronics: Technology and applications

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Sandia National Laboratories has a substantial effort in development of microelectromechanical system (MEMS) technologies. This miniaturization capability can lead to low-cost, small, high-performance systems-on-a-chip, and have many applications ranging from advanced military systems to large-volume commercial markets like automobiles, rf or land-based communications networks and equipment, or commercial electronics. One of the key challenges in realization of the microsystem is integration of several technologies including digital electronics; analog and rf electronics, optoelectronics, sensors and actuators, and advanced packaging technologies. In this work they describe efforts in integrating MEMS and optoelectronic or photonic functions and the fabrication constraints on both system ... continued below

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5 p.

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Warren, M.E.; Blum, O.; Sullivan, C.T.; Shul, R.J.; Rodgers, M.S. & Sniegowski, J.J. April 1, 1998.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Sandia National Laboratories has a substantial effort in development of microelectromechanical system (MEMS) technologies. This miniaturization capability can lead to low-cost, small, high-performance systems-on-a-chip, and have many applications ranging from advanced military systems to large-volume commercial markets like automobiles, rf or land-based communications networks and equipment, or commercial electronics. One of the key challenges in realization of the microsystem is integration of several technologies including digital electronics; analog and rf electronics, optoelectronics, sensors and actuators, and advanced packaging technologies. In this work they describe efforts in integrating MEMS and optoelectronic or photonic functions and the fabrication constraints on both system components. the MEMS technology used in this work are silicon surface-machined systems fabricated using the SUMMiT (Sandia Ultraplanar Multilevel MEMS Technology) process developed at Sandia. This process includes chemical-mechanical polishing as an intermediate planarization step to allow the use of 4 or 5 levels of polysilicon.

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5 p.

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OSTI as DE98004951

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  • Summer topical meeting on optical MEMS, Monterey, CA (United States), 20-22 Jul 1998

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  • Other: DE98004951
  • Report No.: SAND--98-0913C
  • Report No.: CONF-980720--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 654188
  • Archival Resource Key: ark:/67531/metadc706617

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  • April 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 13, 2016, 2:38 p.m.

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Warren, M.E.; Blum, O.; Sullivan, C.T.; Shul, R.J.; Rodgers, M.S. & Sniegowski, J.J. The integration of surface micromachined devices with optoelectronics: Technology and applications, article, April 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc706617/: accessed October 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.