Micromachined systems-on-a-chip: Infrastructure, technology and applications

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A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range of micromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro-engine driven mirror, and a micromachined lock. Using a novel integrated MEMS/CMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an ... continued below

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6 p.

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Krygowski, T.W.; Schriner, H.; Sniegowski, J.J.; Rodgers, M.S.; Montague, S.; Allen, J.J. et al. October 1, 1998.

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Description

A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range of micromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro-engine driven mirror, and a micromachined lock. Using a novel integrated MEMS/CMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

Physical Description

6 p.

Notes

OSTI as DE98002975

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  • International conference on integrated nano/microtechnology for space applications (NanoSpace 98), Houston, TX (United States), 1-6 Nov 1998

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  • Other: DE98002975
  • Report No.: SAND--98-2069C
  • Report No.: CONF-981117--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 674590
  • Archival Resource Key: ark:/67531/metadc706186

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  • October 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • May 5, 2016, 8:40 p.m.

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Krygowski, T.W.; Schriner, H.; Sniegowski, J.J.; Rodgers, M.S.; Montague, S.; Allen, J.J. et al. Micromachined systems-on-a-chip: Infrastructure, technology and applications, article, October 1, 1998; United States. (digital.library.unt.edu/ark:/67531/metadc706186/: accessed September 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.