A transparent anode array detector for 3D atom probes

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In a three dimensional atom probe, the identity and spatial coordinates of the atoms field evaporated from the specimen are determined. Their identity is calculated from the flight time from the specimen to the single atom detector. The x and y coordinates of the atom in the specimen are determined from the coordinates of its impact position on the position-sensitive detector and the z coordinate is determined from its position in the evaporation sequence. These data may then be reconstructed to visualize and quantify the distribution of all the elements in the specimen. Several types of position-sensitive detectors have been ... continued below

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4 p.

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Miller, M.K. February 1, 1998.

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Description

In a three dimensional atom probe, the identity and spatial coordinates of the atoms field evaporated from the specimen are determined. Their identity is calculated from the flight time from the specimen to the single atom detector. The x and y coordinates of the atom in the specimen are determined from the coordinates of its impact position on the position-sensitive detector and the z coordinate is determined from its position in the evaporation sequence. These data may then be reconstructed to visualize and quantify the distribution of all the elements in the specimen. Several types of position-sensitive detectors have been used including a wedge-and-strip detector (position- sensitive atom probe), a 10 by 10 array of anodes (tomographic atom probe), and a gateable CCD camera (optical atom probe). The wedge-and strip and the CCD camera detectors both suffer from the limitation that if more than one atom strikes the detector on a field evaporation pulse then the impact positions cannot be determined in many cases. In order to minimize this limitation, Cerezo et al. have developed a dual detector system (optical position-sensitive atom probe) that uses both an 8 by 10 multianode array and an intensified CCD camera. This dual detector configuration requires a beam splitter which reduces the signal intensity reaching the detectors and two independent detection systems both with image intensifiers. In this paper, an improved version of this detection system that combines these two systems into one is presented.

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4 p.

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OSTI as DE98005020

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  • Microscopy and microanalysis 1998, Atlanta, GA (United States), 12-16 Jul 1998

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  • Other: DE98005020
  • Report No.: ORNL/CP--96519
  • Report No.: CONF-980713--
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 650360
  • Archival Resource Key: ark:/67531/metadc706176

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Office of Scientific & Technical Information Technical Reports

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  • February 1, 1998

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  • Sept. 12, 2015, 6:31 a.m.

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  • Jan. 21, 2016, 1:18 p.m.

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Miller, M.K. A transparent anode array detector for 3D atom probes, article, February 1, 1998; Tennessee. (digital.library.unt.edu/ark:/67531/metadc706176/: accessed August 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.