A hinged-pad test structure for sliding friction measurement in micromachining

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Description

The authors describe the design, modeling, fabrication and initial testing of a new test structure for friction measurement in MEMS. The device consists of a cantilevered forked beam and a friction pad attached via a hinge. Compared to previous test structures, the proposed structure can measure friction over much larger pressure ranges, yet occupies one hundred times less area. The placement of the hinge is crucial to obtaining a well-known and constant pressure distribution in the device. Static deflections on the device were measured and modeled numerically, Preliminary results indicate that friction pad slip is sensitive to friction pad normal ... continued below

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9 p.

Creation Information

Boer, M.P. de; Redmond, J.M. & Michalske, T.A. August 1, 1998.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

The authors describe the design, modeling, fabrication and initial testing of a new test structure for friction measurement in MEMS. The device consists of a cantilevered forked beam and a friction pad attached via a hinge. Compared to previous test structures, the proposed structure can measure friction over much larger pressure ranges, yet occupies one hundred times less area. The placement of the hinge is crucial to obtaining a well-known and constant pressure distribution in the device. Static deflections on the device were measured and modeled numerically, Preliminary results indicate that friction pad slip is sensitive to friction pad normal force.

Physical Description

9 p.

Notes

OSTI as DE98007268

Source

  • Micromachining and microfabrication symposium, Santa Clara, CA (United States), 21-22 Sep 1998

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  • Other: DE98007268
  • Report No.: SAND--98-1759C
  • Report No.: CONF-980918--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 663238
  • Archival Resource Key: ark:/67531/metadc705004

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • August 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • May 5, 2016, 8:30 p.m.

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Boer, M.P. de; Redmond, J.M. & Michalske, T.A. A hinged-pad test structure for sliding friction measurement in micromachining, article, August 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc705004/: accessed October 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.