Lead zirconate titanate on base metal foils: An approach for embedded high-K passive components

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An approach for embedding high-K dielectric thin films into polymer packages has been developed. Pb{sub 0.85}La{sub 0.15}(Zr{sub 0.52}Ti{sub 0.48}){sub 0.96}O{sub 3} thin films were prepared by chemical solution deposition on 50 {micro}m thick Ni-coated Cu foils. Sputter deposited Ni top electrodes completed the all base-metal capacitor stack. After high temperature N{sub 2} crystallization anneals, the PLZT composition showed reduction resistance while the base-metal foils remained flexible. Capacitance density and Loss tangent values range between 300 and 400 nF/cm{sup 2} and 0.01 and 0.02 from 1 to 1,000 kHz respectively. These properties represent a 2 to 3 order of magnitude improvement ... continued below

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7 p.

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Maria, J.-P.; Cheek, K.; Streiffer, S. K.; Kim, S.-H.; Dunn, G. & Kingon, A. I. January 26, 2000.

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An approach for embedding high-K dielectric thin films into polymer packages has been developed. Pb{sub 0.85}La{sub 0.15}(Zr{sub 0.52}Ti{sub 0.48}){sub 0.96}O{sub 3} thin films were prepared by chemical solution deposition on 50 {micro}m thick Ni-coated Cu foils. Sputter deposited Ni top electrodes completed the all base-metal capacitor stack. After high temperature N{sub 2} crystallization anneals, the PLZT composition showed reduction resistance while the base-metal foils remained flexible. Capacitance density and Loss tangent values range between 300 and 400 nF/cm{sup 2} and 0.01 and 0.02 from 1 to 1,000 kHz respectively. These properties represent a 2 to 3 order of magnitude improvement over available embedded capacitor technologies for polymeric packages.

Physical Description

7 p.

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OSTI as DE00751892

Medium: P; Size: 7 pages

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  • US-Japan Seminar on Dielectric and Piezoelectric Ceramics, Okinawa (JP), 11/03/1999--11/05/1999

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  • Report No.: ANL/MSD/CP-100959
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 751892
  • Archival Resource Key: ark:/67531/metadc704004

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  • January 26, 2000

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  • Sept. 12, 2015, 6:31 a.m.

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  • April 11, 2017, 3:32 p.m.

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Maria, J.-P.; Cheek, K.; Streiffer, S. K.; Kim, S.-H.; Dunn, G. & Kingon, A. I. Lead zirconate titanate on base metal foils: An approach for embedded high-K passive components, article, January 26, 2000; Illinois. (digital.library.unt.edu/ark:/67531/metadc704004/: accessed December 13, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.