Lubrication of polysilicon micromechanisms with self-assembled monolayers

PDF Version Also Available for Download.

Description

Here, the authors report on the lubricating effects of self-assembled monolayers (SAMs) on MEMS by measuring static and dynamic friction with two polysilicon surface- micromachined devices. The first test structure is used to study friction between laterally sliding surfaces and with the second, friction between vertical sidewalls can be investigated. Both devices are SAM-coated following the sacrificial oxide etch and the microstructures emerge released and dry from the final water rinse. The coefficient of static friction, {mu}{sub s} was found to decrease from 2.1 {+-} 0.8 for the SiO{sub 2} coating to 0.11 {+-} 0.01 and 0.10 {+-} 0.01 for ... continued below

Physical Description

7 p.

Creation Information

Srinivasan, U.; Foster, J.D.; Habib, U.; Howe, R.T.; Maboudian, R.; Senft, D.C. et al. June 1, 1998.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Authors

Sponsors

Publisher

  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

Here, the authors report on the lubricating effects of self-assembled monolayers (SAMs) on MEMS by measuring static and dynamic friction with two polysilicon surface- micromachined devices. The first test structure is used to study friction between laterally sliding surfaces and with the second, friction between vertical sidewalls can be investigated. Both devices are SAM-coated following the sacrificial oxide etch and the microstructures emerge released and dry from the final water rinse. The coefficient of static friction, {mu}{sub s} was found to decrease from 2.1 {+-} 0.8 for the SiO{sub 2} coating to 0.11 {+-} 0.01 and 0.10 {+-} 0.01 for films derived from octadecyltrichloro-silane (OTS) and 1H,1H,2H,2H-perfluorodecyl-trichlorosilane (FDTS). Both OTS and FDTS SAM-coated structures exhibit dynamic coefficients of friction, {mu}{sub d} of 0.08 {+-} 0.01. These values were found to be independent of the apparent contact area, and remain unchanged after 1 million impacts at 5.6 {micro}N (17 kPa), indicating that these SAMs continue to act as boundary lubricants despite repeated impacts. Measurements during sliding friction from the sidewall friction testing structure give comparable initial {mu}{sub d} values of 0.02 at a contact pressure of 84 MPa. After 15 million wear cycles, {mu}{sub d} was found to rise to 0.27. Wear of the contacting surfaces was examined by SEM. Standard deviations in the {mu} data for SAM treatments indicate uniform coating coverage.

Physical Description

7 p.

Notes

OSTI as DE98004530

Source

  • 1998 solid state sensor and actuator workshop, Hilton Head, SC (United States), 1 Jun 1998

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Other: DE98004530
  • Report No.: SAND--98-0848C
  • Report No.: CONF-980638--
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/671989 | External Link
  • Office of Scientific & Technical Information Report Number: 671989
  • Archival Resource Key: ark:/67531/metadc703846

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this report?

When

Dates and time periods associated with this report.

Creation Date

  • June 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

Description Last Updated

  • Aug. 23, 2016, 3:09 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 5

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Srinivasan, U.; Foster, J.D.; Habib, U.; Howe, R.T.; Maboudian, R.; Senft, D.C. et al. Lubrication of polysilicon micromechanisms with self-assembled monolayers, report, June 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc703846/: accessed December 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.