Use of the disk-of-least-confusion in X-ray microanalysis

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A Philips XL30/FEG scanning electron microscope equipped with both energy dispersive and wavelength dispersive spectrometers (EDS and WDS) was used in this study. A cleaved GaAs test specimen was used to measure the current distribution in electron probes at 5 and 20 kV as a function of aperture size and objective lens defocus. The generated Ga K{sub {alpha}} x-ray intensity as measured by WDS was used to indicate the integrated current incident on the specimen as a function of distance relative to the specimen edge. Probe diameters can be estimated from profiles of the generated x-rays in the same manner ... continued below

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4 p.

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Kenik, E.A. & Ren, S.X. February 1, 1998.

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A Philips XL30/FEG scanning electron microscope equipped with both energy dispersive and wavelength dispersive spectrometers (EDS and WDS) was used in this study. A cleaved GaAs test specimen was used to measure the current distribution in electron probes at 5 and 20 kV as a function of aperture size and objective lens defocus. The generated Ga K{sub {alpha}} x-ray intensity as measured by WDS was used to indicate the integrated current incident on the specimen as a function of distance relative to the specimen edge. Probe diameters can be estimated from profiles of the generated x-rays in the same manner that such diameters can be estimated from the integrated current profiles. Unfortunately, the x-ray intensity is not always proportional to the incident current. When an electron is incident on the GaAs near the cleaved edge, the x-ray yield is reduced when the electron escapes from the edge. Monte Carlo simulations for GaAs at 20 kV indicate that the normalized yield drops from 1 at {approximately}5 {micro}m from the edge to {approximately}0.2 near the edge. Experimental measurements show a similar decrease in normalized x-ray yield near the specimen edge. Both Monte Carlo simulations and measurements show that the magnitude of this effect is reduced at lower accelerating voltage as the spatial extent of the analyzed volume is decreased. X-ray intensities are normalized to that measured on the specimen at 10 {micro}m from the cleaved edge.

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4 p.

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INIS; OSTI as DE98005025

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  • Microscopy and microanalysis 1998, Atlanta, GA (United States), 12-16 Jul 1998

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  • Other: DE98005025
  • Report No.: ORNL/CP--96449
  • Report No.: CONF-980713--
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 650189
  • Archival Resource Key: ark:/67531/metadc703032

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  • February 1, 1998

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  • Sept. 12, 2015, 6:31 a.m.

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  • Nov. 3, 2016, 6:59 p.m.

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Kenik, E.A. & Ren, S.X. Use of the disk-of-least-confusion in X-ray microanalysis, article, February 1, 1998; Tennessee. (digital.library.unt.edu/ark:/67531/metadc703032/: accessed June 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.