A Method for Achieving Constant Rotation Rates in a Micro-Orthogonal Linkage System

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Description

Silicon micromachine designs include engines that consist of orthog- onally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {micro}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Generally, these en- gines will run with non-uniform rotation rates if the drive signals are not properly designed and maintained over a range of system parameters. We present a method for producing constant rotation rates in a micro-engine driven by an orthogonal linkage system. We show that provided the val- ues of certain masses, springs, damping factors, and lever ... continued below

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44 Pages

Creation Information

Dickey, F.M.; Holswade, S.C. & Romero, L.A. May 12, 1999.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
    Place of Publication: Albuquerque, New Mexico

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Description

Silicon micromachine designs include engines that consist of orthog- onally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {micro}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Generally, these en- gines will run with non-uniform rotation rates if the drive signals are not properly designed and maintained over a range of system parameters. We present a method for producing constant rotation rates in a micro-engine driven by an orthogonal linkage system. We show that provided the val- ues of certain masses, springs, damping factors, and lever arms are in the right proportions, the system behaves as though it were symmetrical. We will refer to systems built in this way as being quasi-symmetrical. We show that if a system is built quasi-symmetrically , then it is possible to achieve constant rotation rates even if one does not know the form of the friction function, or the value of the friction. We analyze this case in some detail.

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44 Pages

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  • Journal Name: Journal of Micromechanics and Microengineering

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  • Report No.: SAND99-1156J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 7041
  • Archival Resource Key: ark:/67531/metadc702289

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • May 12, 1999

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • Nov. 29, 2016, 8:03 p.m.

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Dickey, F.M.; Holswade, S.C. & Romero, L.A. A Method for Achieving Constant Rotation Rates in a Micro-Orthogonal Linkage System, article, May 12, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc702289/: accessed October 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.