Unified model of the rf plasma sheath

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Description

By developing an approximation to the first integral of the Poisson equation, one can obtain solutions for the voltage-current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory adequately reproduces the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. Contained within the approximation is a time constant which controls the amount of ion response to the rf electric field. A prescription is given for determining this ion relaxation ... continued below

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35 p.

Creation Information

Riley, M.E. May 1, 1995.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

By developing an approximation to the first integral of the Poisson equation, one can obtain solutions for the voltage-current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory adequately reproduces the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. Contained within the approximation is a time constant which controls the amount of ion response to the rf electric field. A prescription is given for determining this ion relaxation time constant, which also determines the time-dependent ion impact energy on the electrode surface.

Physical Description

35 p.

Notes

OSTI as DE95012114

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  • Other Information: PBD: May 1995

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  • Other: DE95012114
  • Report No.: SAND--95-0775
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/70709 | External Link
  • Office of Scientific & Technical Information Report Number: 70709
  • Archival Resource Key: ark:/67531/metadc701914

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  • May 1, 1995

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 14, 2016, 1:58 p.m.

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Riley, M.E. Unified model of the rf plasma sheath, report, May 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc701914/: accessed August 16, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.