Microstructures and mechanical properties of sputtered Cu/Cr multilayers

PDF Version Also Available for Download.

Description

The microstructures and mechanical properties of Cu/Cr multilayers prepared by sputtering onto {l_brace}100{r_brace} Si substrates at room temperature are presented. The films exhibit columnar grain microstructures with nanoscale grain sizes. The interfaces are planar and abrupt with no intermixing, as expected from the phase diagram. The multilayers tend to adopt a Kurdjumov-Sachs (KS) orientation relationship: {l_brace}110{r_brace}Cr // {l_brace}111{r_brace}Cu, <111>Cr // <110>Cu. The hardness of the multilayered structures, as measured by nanoindentation, increase with decreasing layer thickness for layer thicknesses ranging from 200 nm to 50 nm, whereas for lower thicknesses the hardness of the multilayers is independent of the layer ... continued below

Physical Description

8 p.

Creation Information

Misra, A.; Kung, H.; Mitchell, T.E.; Jervis, T.R. & Nastasi, M. March 1, 1998.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Sponsor

Publisher

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

The microstructures and mechanical properties of Cu/Cr multilayers prepared by sputtering onto {l_brace}100{r_brace} Si substrates at room temperature are presented. The films exhibit columnar grain microstructures with nanoscale grain sizes. The interfaces are planar and abrupt with no intermixing, as expected from the phase diagram. The multilayers tend to adopt a Kurdjumov-Sachs (KS) orientation relationship: {l_brace}110{r_brace}Cr // {l_brace}111{r_brace}Cu, <111>Cr // <110>Cu. The hardness of the multilayered structures, as measured by nanoindentation, increase with decreasing layer thickness for layer thicknesses ranging from 200 nm to 50 nm, whereas for lower thicknesses the hardness of the multilayers is independent of the layer thickness. Dislocation-based models are used to interpret the variation of hardness with layer periodicity. The possible effects of factors such as grain size within the layers, density and composition of films and residual stress in the multilayers are highlighted. Comparisons are made to the mechanical properties of sputtered polycrystalline Cu/Nb multilayers which, like Cu/Cr, exhibit sharp fcc/bcc interfaces with no intermixing and a KS orientation relationship, but have a small shear modulus mismatch.

Physical Description

8 p.

Notes

OSTI as DE98004390

Source

  • 1997 fall meeting of the Materials Research Society, Boston, MA (United States), 1-5 Dec 1997

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Other: DE98004390
  • Report No.: LA-UR--97-5029
  • Report No.: CONF-971201--
  • Grant Number: W-7405-ENG-36
  • DOI: 10.2172/672097 | External Link
  • Office of Scientific & Technical Information Report Number: 672097
  • Archival Resource Key: ark:/67531/metadc701897

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this report?

When

Dates and time periods associated with this report.

Creation Date

  • March 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

Description Last Updated

  • May 5, 2016, 7:37 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 2

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

Citations, Rights, Re-Use

Misra, A.; Kung, H.; Mitchell, T.E.; Jervis, T.R. & Nastasi, M. Microstructures and mechanical properties of sputtered Cu/Cr multilayers, report, March 1, 1998; New Mexico. (digital.library.unt.edu/ark:/67531/metadc701897/: accessed October 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.