LIGA fabrication of mm-wave accelerating cavity structures at the Advanced Photon Source (APS)

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Recent microfabrication technologies based on the LIGA (German acronym for Lithographe, Galvanoformung, und Abformung) process have been applied to build high-aspect-ratio, metallic or dielectric planar structures suitable for high-frequency rf cavity structures. The cavity structures would be used as parts of linear accelerators, microwave undulators, and mm-wave amplifiers. The microfabrication process includes manufacture of precision x-ray masks, exposure of positive resist x-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant-impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated with the synchrotron radiation sources at APS and NSLS. This paper will ... continued below

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4 p.

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Song, J.J.; Bajikar, S. & Kang, Y.W. August 1, 1997.

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Description

Recent microfabrication technologies based on the LIGA (German acronym for Lithographe, Galvanoformung, und Abformung) process have been applied to build high-aspect-ratio, metallic or dielectric planar structures suitable for high-frequency rf cavity structures. The cavity structures would be used as parts of linear accelerators, microwave undulators, and mm-wave amplifiers. The microfabrication process includes manufacture of precision x-ray masks, exposure of positive resist x-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant-impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated with the synchrotron radiation sources at APS and NSLS. This paper will present an overview of the new technology and details of the mm-wave cavity fabrication.

Physical Description

4 p.

Notes

INIS; OSTI as DE97053309

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  • 17. IEEE particle accelerator conference, Vancouver (Canada), 12-16 May 1997

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  • Other: DE97053309
  • Report No.: ANL/ASD/CP--92274
  • Report No.: CONF-970503--
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 542028
  • Archival Resource Key: ark:/67531/metadc699365

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  • August 1, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • Dec. 15, 2015, 12:16 p.m.

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Song, J.J.; Bajikar, S. & Kang, Y.W. LIGA fabrication of mm-wave accelerating cavity structures at the Advanced Photon Source (APS), article, August 1, 1997; Illinois. (digital.library.unt.edu/ark:/67531/metadc699365/: accessed September 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.