Optical measurement of LIGA milliengine performance

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Description

Understanding the parameters that affect the performance of milliscale and microscale actuators is essential to the development of optimized designs and fabrication processes, as well as the qualification of devices for commercial applications. This paper discusses the development of optical techniques for motion measurements of LIGA fabricated milliengines. LIGA processing permits the fabrication of precision millimeter-sized machine elements that cannot be fabricated by conventional miniature machining techniques because of their small feature sizes. In addition, tolerances of 1 part in 10{sup 3} to 10{sup 4} may be maintained in millimeter sized components with this processing technique. Optical techniques offer a ... continued below

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9 p.

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Dickey, F.M.; Holswade, S.C.; Christenson, T.R.; Garcia, E.J. & Polosky, M.A. December 31, 1997.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Understanding the parameters that affect the performance of milliscale and microscale actuators is essential to the development of optimized designs and fabrication processes, as well as the qualification of devices for commercial applications. This paper discusses the development of optical techniques for motion measurements of LIGA fabricated milliengines. LIGA processing permits the fabrication of precision millimeter-sized machine elements that cannot be fabricated by conventional miniature machining techniques because of their small feature sizes. In addition, tolerances of 1 part in 10{sup 3} to 10{sup 4} may be maintained in millimeter sized components with this processing technique. Optical techniques offer a convenient means for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. Optical techniques can also be used to provide feedback signals needed for control and sensing of the state of the machine. Optical probe concepts and experimental data obtained using a milliengine developed at Sandia National Laboratories are presented.

Physical Description

9 p.

Notes

OSTI as DE98001732

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  • BIOS `98: an international symposium on biomedical optics, San Jose, CA (United States), 24-30 Jan 1998

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  • Other: DE98001732
  • Report No.: SAND--97-3180C
  • Report No.: CONF-980117--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 564209
  • Archival Resource Key: ark:/67531/metadc698763

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Office of Scientific & Technical Information Technical Reports

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  • December 31, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • April 14, 2016, 5:57 p.m.

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Dickey, F.M.; Holswade, S.C.; Christenson, T.R.; Garcia, E.J. & Polosky, M.A. Optical measurement of LIGA milliengine performance, article, December 31, 1997; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc698763/: accessed May 25, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.