Electro-thermal modeling of a microbridge gas sensor

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Fully CMOS-compatible, surface-micromachined polysilicon microbridges have been designed, fabricated, and tested for use in catalytic, calorimetric gas sensing. To improve sensor behavior, extensive electro-thermal modeling efforts were undertaken using SPICE. The validity of the SPICE model was verified comparing its simulated behavior with experiment. Temperature distribution of an electrically heated microbridges was measured using an infrared microscope. Comparisons among the measured distribution, the SPICE simulation, and distributions obtained by analytical methods show that heating at the ends of a microbridges has important implications for device response. Additional comparisons between measured and simulated current-voltage characteristics, as well as transient response, further ... continued below

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13 p.

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Manginell, R.P.; Smith, J.H.; Ricco, A.J.; Hughes, R.C.; Moreno, D.J. & Huber, R.J. August 1, 1997.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 27 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Fully CMOS-compatible, surface-micromachined polysilicon microbridges have been designed, fabricated, and tested for use in catalytic, calorimetric gas sensing. To improve sensor behavior, extensive electro-thermal modeling efforts were undertaken using SPICE. The validity of the SPICE model was verified comparing its simulated behavior with experiment. Temperature distribution of an electrically heated microbridges was measured using an infrared microscope. Comparisons among the measured distribution, the SPICE simulation, and distributions obtained by analytical methods show that heating at the ends of a microbridges has important implications for device response. Additional comparisons between measured and simulated current-voltage characteristics, as well as transient response, further support the accuracy of the model. A major benefit of electro- thermal modeling with SPICE is the ability to simultaneously simulate the behavior of a device and its control/sensing electronics. Results for the combination of a unique constant-resistance control circuit and microbridges gas sensor are given. Models of in situ techniques for monitoring catalyst deposition are shown to be in agreement with experiment. Finally, simulated chemical response of the detector is compared with the data, and methods of improving response through modifications in bridge geometry are predicted.

Physical Description

13 p.

Notes

OSTI as DE97007266

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  • SPIE symposium on micromachining and microfabrication, Austin, TX (United States), 29-30 Sep 1997

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  • Other: DE97007266
  • Report No.: SAND--97-1732C
  • Report No.: CONF-970968--7
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 522245
  • Archival Resource Key: ark:/67531/metadc698452

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • August 1, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • April 14, 2016, 3:44 p.m.

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Manginell, R.P.; Smith, J.H.; Ricco, A.J.; Hughes, R.C.; Moreno, D.J. & Huber, R.J. Electro-thermal modeling of a microbridge gas sensor, article, August 1, 1997; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc698452/: accessed October 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.