An instrument for gravimetric calibration of flow devices with corrosive gases

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Description

An instrument was developed for the calibration of mass flow controllers primarily used in the production of semiconductor wafers. Almost all other types of such calibrators require measurement of temperature, pressure and volume. This instrument measures the weight of gas collected in a container and makes measuring those thermodynamic variables unnecessary. The need to measure the weight of the gas container is eliminated by submerging it in a liquid (presently water) and balancing its weight with the force of buoyancy. The accuracy of this Gravimetric Calibrator is unaffected by the pressure and temperature of the gas. The Calibrator can also ... continued below

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6 p.

Creation Information

Remenyik, C. J. & Hylton, J. O. April 1995.

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Description

An instrument was developed for the calibration of mass flow controllers primarily used in the production of semiconductor wafers. Almost all other types of such calibrators require measurement of temperature, pressure and volume. This instrument measures the weight of gas collected in a container and makes measuring those thermodynamic variables unnecessary. The need to measure the weight of the gas container is eliminated by submerging it in a liquid (presently water) and balancing its weight with the force of buoyancy. The accuracy of this Gravimetric Calibrator is unaffected by the pressure and temperature of the gas. The Calibrator can also measure reactive, corrosive, and non-ideal gases. The container remains connected to the process by a torsion capillary, and a load cell measures the changing gas weight continuously throughout the measuring process. A prototype was designed for gas flows ranging from 1 sccm of hydrogen to 10,000 sccm of tungsten hexafluoride, constructed, tested, and used to calibrate flow devices. Experience with the prototype and results are presented, and plans for further developments are discussed. Design of a version for the flow range from 0.1 sccm to 100 sccm is in progress.

Physical Description

6 p.

Notes

OSTI as DE95009700

Source

  • 41. international instrumentation symposium, Auora, CO (United States), 7-11 May 1995

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  • Other: DE95009700
  • Report No.: CONF-9505201--2
  • Grant Number: AC05-84OR21400
  • Office of Scientific & Technical Information Report Number: 52825
  • Archival Resource Key: ark:/67531/metadc698133

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • April 1995

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • Jan. 25, 2016, 8:02 p.m.

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Remenyik, C. J. & Hylton, J. O. An instrument for gravimetric calibration of flow devices with corrosive gases, article, April 1995; Tennessee. (digital.library.unt.edu/ark:/67531/metadc698133/: accessed October 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.