A timeshared foreline and roughing vacuum system

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Description

A system to perform turbomolecular drag foreline pumping and scattering chamber roughing was installed in the Surface Modification and Characterization Research Center at Oak Ridge National Laboratory. The system consists of an oil-free mechanical scroll pump that can be connected to either a roughing manifold serving four scattering chambers or to a foreline ballast tank and manifold serving five turbomolecular drag pumps. A controller mediates the demands of the two manifolds, giving priority to the foreline. Due to the low leakage from the accelerator beamlines, the duty cycle in the foreline pumping mode consists of a few minutes of operating ... continued below

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8 p.

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Hensley, D.K.; Thomas, D.K. & Poker, D.B. November 1, 1997.

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Description

A system to perform turbomolecular drag foreline pumping and scattering chamber roughing was installed in the Surface Modification and Characterization Research Center at Oak Ridge National Laboratory. The system consists of an oil-free mechanical scroll pump that can be connected to either a roughing manifold serving four scattering chambers or to a foreline ballast tank and manifold serving five turbomolecular drag pumps. A controller mediates the demands of the two manifolds, giving priority to the foreline. Due to the low leakage from the accelerator beamlines, the duty cycle in the foreline pumping mode consists of a few minutes of operating time every few days, greatly reducing wear on the scroll pump. Significant savings are realized due to reduced consumption of liquid nitrogen for sorption pumping, elimination of oil changes and repairs to individual mechanical foreline pumps, and lower electrical power consumption.

Physical Description

8 p.

Notes

INIS; OSTI as DE98001434

Source

  • Symposium of North Eastern Accelerator Personnel, Aachen (Germany), 13-15 Oct 1997

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  • Other: DE98001434
  • Report No.: ORNL/CP--95383
  • Report No.: CONF-9710106--
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 555564
  • Archival Resource Key: ark:/67531/metadc697660

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Creation Date

  • November 1, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • Jan. 22, 2016, 6:54 p.m.

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Hensley, D.K.; Thomas, D.K. & Poker, D.B. A timeshared foreline and roughing vacuum system, article, November 1, 1997; Tennessee. (digital.library.unt.edu/ark:/67531/metadc697660/: accessed August 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.