Surface analysis of all elements with isotopic resolution at high ambient pressures using ion spectroscopic techniques

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The authors have developed a mass spectrometer capable of surface analysis using the techniques of secondary ion mass spectroscopy (SIMS) and mass spectroscopy of recoiled ions (MSRI). For SIMS, an energetic ion beam creates a collision cascade which results in the ejection of low kinetic energy secondary ions from the surface being analyzed. The low kinetic energy SIMS ions are very susceptible to charge neutralization with the surface, and as a result, the SIMS ion yield varies by orders of magnitude depending on the chemical state of the surface. SIM spectra contain elemental ions, and molecular ions. For MSRI, a ... continued below

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6 p.

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Smentkowski, V.S.; Krauss, A.R.; Gruen, D.M.; Holecek, J.C. & Schultz, J.A. September 1, 1997.

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The authors have developed a mass spectrometer capable of surface analysis using the techniques of secondary ion mass spectroscopy (SIMS) and mass spectroscopy of recoiled ions (MSRI). For SIMS, an energetic ion beam creates a collision cascade which results in the ejection of low kinetic energy secondary ions from the surface being analyzed. The low kinetic energy SIMS ions are very susceptible to charge neutralization with the surface, and as a result, the SIMS ion yield varies by orders of magnitude depending on the chemical state of the surface. SIM spectra contain elemental ions, and molecular ions. For MSRI, a pulsed ion beam induces a binary collision with the surface being analyzed and the surface species are recoiled into the forward scattering direction with a large kinetic energy. The violence of the binary collision results in complete molecular decomposition, and only elemental ions are detected. The high kinetic energy MSRI ions are much less susceptible to charge neutralization with the surface than the low kinetic energy SIMS ions. In MSRI, the ion yield typically varies by less than a factor of ten as the chemical state of the surface changes--simplifying quantitative analysis vs. SIMS. In this paper, they authors will demonstrate that the high kinetic energy MSRI ions are able to transverse high pressure paths with only a reduction in peak intensity--making MSRI an ideal tool for real-time, in-situ film growth studies. The use of a single analyzer for both MSRI and SIMS is unique and provides complimentary information.

Physical Description

6 p.

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OSTI as DE97054051

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  • International conference on secondary ion mass spectrometry, Orlando, FL (United States), 7-12 Sep 1997; Other Information: DN: CRADA C9405001

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  • Other: DE97054051
  • Report No.: ANL/CHM/CP--93625
  • Report No.: CONF-970933--
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 554792
  • Archival Resource Key: ark:/67531/metadc697299

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  • September 1, 1997

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  • Aug. 14, 2015, 8:43 a.m.

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  • Dec. 15, 2015, 12:06 p.m.

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Smentkowski, V.S.; Krauss, A.R.; Gruen, D.M.; Holecek, J.C. & Schultz, J.A. Surface analysis of all elements with isotopic resolution at high ambient pressures using ion spectroscopic techniques, article, September 1, 1997; Illinois. (digital.library.unt.edu/ark:/67531/metadc697299/: accessed August 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.