SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education)

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Description

The SAMPLE (Sandia Agile MEMS Protyping, Layout tools, and Education) service makes Sandia`s state-of-the-art surface-micromachining fabrication process, known as SUMMiT, available to US industry for the first time. The service provides a short cause and customized computer-aided design (CAD) tools to assist customers in designing micromachine prototypes to be fabricated in SUMMiT. Frequent small-scale manufacturing runs then provide SAMPLE designers with hundreds of sophisticated MEMS (MicroElectroMechanical Systems) chips. SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology) offers unique surface-micromachining capabilities, including four levels of polycrystalline silicon (including the ground layer), flanged hubs, substrate contacts, one-micron design rules, and chemical-mechanical polishing (CMP) planarization. ... continued below

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11 p.

Creation Information

Davies, B.R.; Barron, C.C.; Sniegowski, J.J. & Rodgers, M.S. August 1, 1997.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 30 times , with 4 in the last month . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

The SAMPLE (Sandia Agile MEMS Protyping, Layout tools, and Education) service makes Sandia`s state-of-the-art surface-micromachining fabrication process, known as SUMMiT, available to US industry for the first time. The service provides a short cause and customized computer-aided design (CAD) tools to assist customers in designing micromachine prototypes to be fabricated in SUMMiT. Frequent small-scale manufacturing runs then provide SAMPLE designers with hundreds of sophisticated MEMS (MicroElectroMechanical Systems) chips. SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology) offers unique surface-micromachining capabilities, including four levels of polycrystalline silicon (including the ground layer), flanged hubs, substrate contacts, one-micron design rules, and chemical-mechanical polishing (CMP) planarization. This paper describes the SUMMiT process, design tools, and other information relevant to the SAMPLE service and SUMMiT process.

Physical Description

11 p.

Notes

OSTI as DE97007154

Source

  • SPIE symposium on micromachining and microfabrication, Austin, TX (United States), 29-30 Sep 1997

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  • Other: DE97007154
  • Report No.: SAND--97-0734C
  • Report No.: CONF-970968--3
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 513527
  • Archival Resource Key: ark:/67531/metadc695946

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • August 1, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

Description Last Updated

  • May 5, 2016, 8:42 p.m.

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Davies, B.R.; Barron, C.C.; Sniegowski, J.J. & Rodgers, M.S. SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education), article, August 1, 1997; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc695946/: accessed October 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.