Characterization of SnO2 Films Prepared Using Tin Tetrachloride and Tetra Methyl Tin Precursors

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We have investigated the effect of deposition conditions of SnO2 films, deposited by chemical vapor deposition using tin tetrachloride and tetramethyltin precursors, on the film properties. The type of precursor and the deposition temperature affect the morphology of the films. The structure of the films is determined by the deposition temperature: films deposited at low temperatures show a mixed SnO and SnO2 phase. The processing temperature and type of substrate determine the impurity content in the films. Electrical properties (e.g. the carrier mobility) and optical properties of the films are affected by the structure and the impurity content in these ... continued below

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Dhere, R. G.; Moutinho, H. R.; Asher, S.; Li, X.; Ribelin, R.; Gessert, T. (National Renewable Energy Laboratory) et al. October 31, 1998.

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Description

We have investigated the effect of deposition conditions of SnO2 films, deposited by chemical vapor deposition using tin tetrachloride and tetramethyltin precursors, on the film properties. The type of precursor and the deposition temperature affect the morphology of the films. The structure of the films is determined by the deposition temperature: films deposited at low temperatures show a mixed SnO and SnO2 phase. The processing temperature and type of substrate determine the impurity content in the films. Electrical properties (e.g. the carrier mobility) and optical properties of the films are affected by the structure and the impurity content in these layers.

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  • National Center for Photovoltaics Program Review Meeting, Denver, CO (US), 09/08/1998--09/11/1998

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  • Other: DE00005061
  • Report No.: NREL/CP-520-25733
  • Grant Number: AC36-99GO10337
  • Office of Scientific & Technical Information Report Number: 5061
  • Archival Resource Key: ark:/67531/metadc694603

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  • October 31, 1998

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  • Aug. 14, 2015, 8:43 a.m.

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  • March 25, 2016, 1:43 p.m.

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Dhere, R. G.; Moutinho, H. R.; Asher, S.; Li, X.; Ribelin, R.; Gessert, T. (National Renewable Energy Laboratory) et al. Characterization of SnO2 Films Prepared Using Tin Tetrachloride and Tetra Methyl Tin Precursors, article, October 31, 1998; Golden, Colorado. (digital.library.unt.edu/ark:/67531/metadc694603/: accessed April 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.