Magnetically-excited flexural plate wave resonator

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Description

A flexural plate wave (FPW) resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. The magnetic field strength required for these devices can be achieved with small permanent magnets ({approx} 1 cm{sup 3}). Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived that characterizes the input impedance of a one-port device and the transmission response of a ... continued below

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28 p.

Creation Information

Martin, S.J.; Butler, M.A.; Spates, J.J.; Schubert, W.K. & Mitchell, M.A. August 1, 1997.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A flexural plate wave (FPW) resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. The magnetic field strength required for these devices can be achieved with small permanent magnets ({approx} 1 cm{sup 3}). Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived that characterizes the input impedance of a one-port device and the transmission response of a two-port device over a range of frequencies near a single membrane resonance. Experiments were performed to characterize the effects of varying magnetic field, ambient gas, gas pressure, and input power. To the authors` knowledge, this is the first experimental demonstration of a resonant FPW device.

Physical Description

28 p.

Notes

OSTI as DE97007913

Source

  • 51. IEEE meeting of the frequency control symposium, Orlando, FL (United States), 28-30 May 1997

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  • Other: DE97007913
  • Report No.: SAND--97-1779C
  • Report No.: CONF-9705139--2
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 515585
  • Archival Resource Key: ark:/67531/metadc693278

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  • August 1, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

Description Last Updated

  • April 14, 2016, 4:17 p.m.

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Martin, S.J.; Butler, M.A.; Spates, J.J.; Schubert, W.K. & Mitchell, M.A. Magnetically-excited flexural plate wave resonator, article, August 1, 1997; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc693278/: accessed January 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.