Trace water vapor determination in nitrogen and corrosive gases using infrared spectroscopy

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The generation of particles in gas handling systems as a result of corrosion is a major concern in the microelectronics industry. The corrosion can be caused by the presence of trace quantities of water in corrosive gases such as HCl or HBr. FTIR spectroscopy has been shown to be a method that can be made compatible with corrosive gases and is capable of detecting low ppb levels of water vapor. In this report, the application of FTIR spectroscopy combined with classical least squares multivariate calibration to detect trace H{sub 2}O in N{sub 2}, HCl and HBr is discussed. Chapter 2 ... continued below

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96 p.

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Espinoza, L.H.; Niemczyk, T.M.; Stallard, B.R. & Garcia, M.J. June 1, 1997.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

The generation of particles in gas handling systems as a result of corrosion is a major concern in the microelectronics industry. The corrosion can be caused by the presence of trace quantities of water in corrosive gases such as HCl or HBr. FTIR spectroscopy has been shown to be a method that can be made compatible with corrosive gases and is capable of detecting low ppb levels of water vapor. In this report, the application of FTIR spectroscopy combined with classical least squares multivariate calibration to detect trace H{sub 2}O in N{sub 2}, HCl and HBr is discussed. Chapter 2 discusses the gas handling system and instrumentation required to handle corrosive gases. A method of generating a background spectrum useful to the measurements discussed in this report, as well as in other application areas such as gas phase environmental monitoring, is discussed in Chapter 3. Experimental results obtained with the first system are presented in Chapter 4. Those results made it possible to optimize the design options for the construction of a dedicate system for low ppb water vapor determination. These designs options are discussed in Chapter 5. An FTIR prototype accessory was built. In addition, a commercially available evacuable FTIR system was obtained for evaluation. Test results obtained with both systems are discussed in Chapter 6. Experiments dealing with the interaction between H{sub 2}O-HCl and potential improvements to the detection system are discussed in Chapter 7.

Physical Description

96 p.

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OSTI as DE97007816

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  • Other Information: PBD: Jun 1997

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  • Other: DE97007816
  • Report No.: SAND--97-1494
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/505268 | External Link
  • Office of Scientific & Technical Information Report Number: 505268
  • Archival Resource Key: ark:/67531/metadc693123

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  • June 1, 1997

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  • Aug. 14, 2015, 8:43 a.m.

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  • April 14, 2016, 1:53 p.m.

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Espinoza, L.H.; Niemczyk, T.M.; Stallard, B.R. & Garcia, M.J. Trace water vapor determination in nitrogen and corrosive gases using infrared spectroscopy, report, June 1, 1997; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc693123/: accessed June 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.