Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427

Thumbnail image of item number 1 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.
Thumbnail image of item number 2 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.
Thumbnail image of item number 3 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.
Thumbnail image of item number 4 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.
Showing 1-4 of 7 pages in this report.

PDF Version Also Available for Download.

Description

The purpose of this project is to evaluate the feasibility of cleaning silicon wafers with an energetic (1 to 100 eV) neutral particle beam and to develop a viable neutral beam source. A microwave plasma source on an existing test stand was modified to produce a 2-cm diameter neutral beam for cleaning the wafers. Significant results regarding neutral beam wafer cleaning are reported.

Physical Description

6 p.

Creation Information

Schechter, D.E.; Tsai, C.C. & Boitnott, C. December 31, 1996.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Authors

Sponsor

Publisher

  • Oak Ridge Y-12 Plant
    Publisher Info: Oak Ridge Y-12 Plant, TN (United States)
    Place of Publication: Tennessee

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

About | Browse this Partner

Contact Us

Corrections Questions

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

The purpose of this project is to evaluate the feasibility of cleaning silicon wafers with an energetic (1 to 100 eV) neutral particle beam and to develop a viable neutral beam source. A microwave plasma source on an existing test stand was modified to produce a 2-cm diameter neutral beam for cleaning the wafers. Significant results regarding neutral beam wafer cleaning are reported.

Physical Description

6 p.

Notes

OSTI as DE97008282

Source

  • Other Information: PBD: 31 Dec 1996

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Other: DE97008282
  • Report No.: Y/AMT--412
  • Grant Number: AC05-84OR21400
  • DOI: 10.2172/515581 | External Link
  • Office of Scientific & Technical Information Report Number: 515581
  • Archival Resource Key: ark:/67531/metadc692242

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

About | Browse this Collection

What responsibilities do I have when using this report?

Digital Files

When

Dates and time periods associated with this report.

Creation Date

  • December 31, 1996

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

Description Last Updated

  • April 8, 2016, 5:10 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 3
More Statistics

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

Thumbnail image of item number 1 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.
Thumbnail image of item number 2 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.
Thumbnail image of item number 3 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.
Thumbnail image of item number 4 in: 'Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427'.

PDF Version Also Available for Download.

Citations, Rights, Re-Use

Schechter, D.E.; Tsai, C.C. & Boitnott, C. Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427, report, December 31, 1996; Tennessee. (digital.library.unt.edu/ark:/67531/metadc692242/: accessed April 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.