Ion-implantation doping of silicon carbide

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Because of their commercial availability in bulk single crystal form, the 6H- and 4H- polytypes of SiC are gaining importance for high-power, high-temperature, and high-frequency device applications. Selective area doping is a crucial processing step in integrated circuit manufacturing. In Si technology, selective area doping is accomplished by thermal diffusion or ion-implantation. Because of the low diffusion coefficients of most impurities in SiC, ion implantation is indispensable in SiC device manufacturing. In this paper the authors present their results on donor, acceptor, and compensation implants in 6H-SiC.

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7 p.

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Gardner, J.; Edwards, A.; Rao, M.V.; Papanicolaou, N.; Kelner, G. & Holland, O.W. October 1, 1997.

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Description

Because of their commercial availability in bulk single crystal form, the 6H- and 4H- polytypes of SiC are gaining importance for high-power, high-temperature, and high-frequency device applications. Selective area doping is a crucial processing step in integrated circuit manufacturing. In Si technology, selective area doping is accomplished by thermal diffusion or ion-implantation. Because of the low diffusion coefficients of most impurities in SiC, ion implantation is indispensable in SiC device manufacturing. In this paper the authors present their results on donor, acceptor, and compensation implants in 6H-SiC.

Physical Description

7 p.

Notes

INIS; OSTI as DE98003167

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  • International semiconductor device research symposium, Charlottesville, VA (United States), 11-13 Dec 1997

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  • Other: DE98003167
  • Report No.: ORNL/CP--95077
  • Report No.: CONF-971213--
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 634084
  • Archival Resource Key: ark:/67531/metadc691995

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  • October 1, 1997

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  • Aug. 14, 2015, 8:43 a.m.

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  • Aug. 23, 2016, 3:08 p.m.

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Gardner, J.; Edwards, A.; Rao, M.V.; Papanicolaou, N.; Kelner, G. & Holland, O.W. Ion-implantation doping of silicon carbide, article, October 1, 1997; Tennessee. (digital.library.unt.edu/ark:/67531/metadc691995/: accessed August 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.