Development of XRMF techniques for measurement of multi-layer film thicknesses on semiconductors for VLSI and ULSI integrated circuits. Final CRADA report for CRADA number Y-1292-0130

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Description

A CRADA with Kevex Instruments was carried out to develop improved XRMF instrumentation for the nondestructive analysis of electronic components during manufacture. Experiments conducted at Y-12 proved the feasibility of a new Kevex x-ray tube design. Tests also show that the current commercial supply of straight glass capillaries is unreliable; however, other vendors of tapered single and multiple glass capillaries were identified. The stability of the Y-12 x-ray microprobe was significantly enhanced as a result of this CRADA.

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7 p.

Creation Information

Carpenter, D.A.; Golijanin, D.L. & Wherry, D. February 3, 1997.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

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  • Oak Ridge Y-12 Plant
    Publisher Info: Oak Ridge Y-12 Plant, TN (United States)
    Place of Publication: Tennessee

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Description

A CRADA with Kevex Instruments was carried out to develop improved XRMF instrumentation for the nondestructive analysis of electronic components during manufacture. Experiments conducted at Y-12 proved the feasibility of a new Kevex x-ray tube design. Tests also show that the current commercial supply of straight glass capillaries is unreliable; however, other vendors of tapered single and multiple glass capillaries were identified. The stability of the Y-12 x-ray microprobe was significantly enhanced as a result of this CRADA.

Physical Description

7 p.

Notes

INIS; OSTI as DE97008830

Source

  • Other Information: PBD: 3 Feb 1997

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  • Other: DE97008830
  • Report No.: Y/AMT--454
  • Grant Number: AC05-84OS21400
  • DOI: 10.2172/527526 | External Link
  • Office of Scientific & Technical Information Report Number: 527526
  • Archival Resource Key: ark:/67531/metadc691564

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Creation Date

  • February 3, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

Description Last Updated

  • April 8, 2016, 5:46 p.m.

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Carpenter, D.A.; Golijanin, D.L. & Wherry, D. Development of XRMF techniques for measurement of multi-layer film thicknesses on semiconductors for VLSI and ULSI integrated circuits. Final CRADA report for CRADA number Y-1292-0130, report, February 3, 1997; Tennessee. (digital.library.unt.edu/ark:/67531/metadc691564/: accessed August 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.