A hard x-ray prototype production exposure station at NSLS

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Description

Exposures conducted at the NSLS R and D beamline (X-27B) for High Aspect Ratio Precision Manufacture have proven sufficiently successful that the authors are constructing a dedicated hard x-ray exposure beamline. The new beamline (X-14B) provides an exposure field {approximately} 120 mm wide, three times larger than that of X-27B. The scanner is based on the hydraulic system from the X-27B program. It is optimized for planar exposures and takes advantage of the full 525 mm stroke available. Exposures of multiple substrates and masks will be possible, with the fixturing supporting mounting of substrate holders from other groups (ALS, APS, ... continued below

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5 p.

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Johnson, E.D. & Milne, J.C. July 1, 1997.

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Description

Exposures conducted at the NSLS R and D beamline (X-27B) for High Aspect Ratio Precision Manufacture have proven sufficiently successful that the authors are constructing a dedicated hard x-ray exposure beamline. The new beamline (X-14B) provides an exposure field {approximately} 120 mm wide, three times larger than that of X-27B. The scanner is based on the hydraulic system from the X-27B program. It is optimized for planar exposures and takes advantage of the full 525 mm stroke available. Exposures of multiple substrates and masks will be possible, with the fixturing supporting mounting of substrate holders from other groups (ALS, APS, CAMD, and UW). The function of this beamline is to establish a hard x-ray exposure station where manufacturing scale protocols can be developed and ultimately exploited for production runs.

Physical Description

5 p.

Notes

INIS; OSTI as DE97008877

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  • HARMST `97: high aspects ration micro systems technology, Madison, WI (United States), 20-21 Jun 1997

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  • Other: DE97008877
  • Report No.: BNL--64629
  • Report No.: CONF-9706176--
  • Grant Number: AC02-76CH00016
  • Office of Scientific & Technical Information Report Number: 541872
  • Archival Resource Key: ark:/67531/metadc690982

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • July 1, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • Nov. 10, 2015, 12:30 p.m.

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Johnson, E.D. & Milne, J.C. A hard x-ray prototype production exposure station at NSLS, article, July 1, 1997; Upton, New York. (digital.library.unt.edu/ark:/67531/metadc690982/: accessed November 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.