MEMS design rule checking: a batch approach for remote operation

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Description

This paper describes a design rule checking (DRC) tool developed as an aid for designing microelectromechanical structures (MEMS) using AutoCAD running on a Windows NT workstation. The application suite, MEMSdrc, consists of: a graphical user interface integrated into AutoCAD to invoke DRC, translation and interface software to communicate with a commercial IC layout design checking software package, and routines to interactively display and review the results. The user interface provides the capability to select a checking window area and specific DRC rules to be applied to the design. The MEMS structures, defined as 2D AutoCAD geometry are translated first into ... continued below

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10 p.

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Yarberry, V.R. January 1, 1998.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 40 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This paper describes a design rule checking (DRC) tool developed as an aid for designing microelectromechanical structures (MEMS) using AutoCAD running on a Windows NT workstation. The application suite, MEMSdrc, consists of: a graphical user interface integrated into AutoCAD to invoke DRC, translation and interface software to communicate with a commercial IC layout design checking software package, and routines to interactively display and review the results. The user interface provides the capability to select a checking window area and specific DRC rules to be applied to the design. The MEMS structures, defined as 2D AutoCAD geometry are translated first into DXF format, then to GDSII format. A remote process transfers the files to a Unix workstation where Mentor Graphics ICverify is invoked to perform the layout design rule checks. Upon completion, the results are translated into DXF geometry and returned back to the Windows NT workstation to be overlaid onto the original design. A set of icons are provided for the user to interactively review the results inside of AutoCAD using a first/next/previous technique.

Physical Description

10 p.

Notes

OSTI as DE98002727

Source

  • 5. annual symposium on smart structures and materials, San Diego, CA (United States), 1-3 Mar 1998

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  • Other: DE98002727
  • Report No.: SAND--D-98-0205C
  • Report No.: CONF-980308--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 634064
  • Archival Resource Key: ark:/67531/metadc690806

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • January 1, 1998

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • May 5, 2016, 8:08 p.m.

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Yarberry, V.R. MEMS design rule checking: a batch approach for remote operation, article, January 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc690806/: accessed October 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.