Comparison of bulk- and surface-micromachined pressure sensors

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Description

Two piezoresistive micromachined pressure sensors were compared: a commercially available bulk-micromachined (BM) pressure sensor and an experimental surface-micromachined (SM) pressure sensor. While the SM parts had significantly smaller die sizes, they were outperformed in most areas by the BM parts. This was due primarily to the smaller piezoresistive gauge factor in the polysilicon piezoresistors in the SM parts compared to the single crystal strain gauge used in the BM parts.

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8 p.

Creation Information

Eaton, W.P.; Smith, J.H.; Monk, D.J.; O`Brien, G. & Miller, T.F. August 1, 1998.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 43 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Two piezoresistive micromachined pressure sensors were compared: a commercially available bulk-micromachined (BM) pressure sensor and an experimental surface-micromachined (SM) pressure sensor. While the SM parts had significantly smaller die sizes, they were outperformed in most areas by the BM parts. This was due primarily to the smaller piezoresistive gauge factor in the polysilicon piezoresistors in the SM parts compared to the single crystal strain gauge used in the BM parts.

Physical Description

8 p.

Notes

OSTI as DE98007269

Source

  • Micromachining and microfabrication symposium, Santa Clara, CA (United States), 21-22 Sep 1998

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  • Other: DE98007269
  • Report No.: SAND--98-1779C
  • Report No.: CONF-980918--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 639758
  • Archival Resource Key: ark:/67531/metadc690783

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • August 1, 1998

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • April 14, 2016, 3:24 p.m.

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Eaton, W.P.; Smith, J.H.; Monk, D.J.; O`Brien, G. & Miller, T.F. Comparison of bulk- and surface-micromachined pressure sensors, article, August 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc690783/: accessed January 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.