Depth profiling of oxidized a-C:D Layers on Be -- A comparison of {sup 4}He RBS and {sup 28}Si ERD analysis

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In applications dealing with the deposition of amorphous hydrogenated carbon layers or in the determination of the composition of deposited layers on the walls of nuclear fusion plasma experiments, the analysis of mixtures of light elements on heavy substrates is necessary. Depth profiling by means of RBS is often difficult due to the overlap of the backscattering intensities of different constituents from different depths. The erosion and reaction of deposited amorphous deuterated carbon (a-C:D) films with a Be substrate due to annealing in air poses an analytical challenge especially if simultaneously the exchange of hydrogen isotopes should be monitored. The ... continued below

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18 p.

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Roth, J.; Mayer, M.; Walsh, D. & Wampler, W.R. June 1, 1997.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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In applications dealing with the deposition of amorphous hydrogenated carbon layers or in the determination of the composition of deposited layers on the walls of nuclear fusion plasma experiments, the analysis of mixtures of light elements on heavy substrates is necessary. Depth profiling by means of RBS is often difficult due to the overlap of the backscattering intensities of different constituents from different depths. The erosion and reaction of deposited amorphous deuterated carbon (a-C:D) films with a Be substrate due to annealing in air poses an analytical challenge especially if simultaneously the exchange of hydrogen isotopes should be monitored. The analysis of the different recoiling atoms from collisions with heavy ions in Elastic Recoil Detection (ERD) can provide a tool which resolves all constituents in a single analysis. In the present study the composition of intermixed layers on Be containing H, D, Be, C and O has been analyzed using conventional {sup 4}He RBS at 2.2 MeV together with 2.5 MeV {sup 4}He ERD for hydrogen isotope analysis. At these energies, an overlap of signals from different constituents could be avoided in most cases. As alternative method heavy ion ERD using Si{sup 7+} ions extracted from a 5 MeV Tandem Van de Graff accelerator was investigated. At a scattering angle of 30{degree} Si ions could not be scattered into the detector and a solid state detector without protecting foil could be used. Even in the intermixed layers at terminal energies of 5 MeV the heavy constituents could be separated while signals from recoiling hydrogen and deuterium atoms could be resolved on top of the signal from the Be substrate. For the analysis of the RBS and ERD data the newly developed spectra simulation program SIMNRA has been used which includes a large data bank for scattering and nuclear reaction cross sections. The depth profiles of all constituents extracted from the simulation are compared for both methods.

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18 p.

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INIS; OSTI as DE98000182

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  • 13. international conference on ion beam analysis (IBA-13), Lisbon (Portugal), 27 Jul - 1 Aug 1997

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  • Other: DE98000182
  • Report No.: SAND--97-2141C
  • Report No.: CONF-970785--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 634156
  • Archival Resource Key: ark:/67531/metadc690714

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  • June 1, 1997

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  • Aug. 14, 2015, 8:43 a.m.

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  • April 14, 2016, 7:31 p.m.

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Roth, J.; Mayer, M.; Walsh, D. & Wampler, W.R. Depth profiling of oxidized a-C:D Layers on Be -- A comparison of {sup 4}He RBS and {sup 28}Si ERD analysis, article, June 1, 1997; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc690714/: accessed November 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.