Efficient polishing of aspheric optics

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Description

The objectives of this project are to develop, evaluate, and optimize novel designs for a polishing tool intended for ultra-precise figure corrections on aspheric optics with tolerances typical of those required for use in extreme ultraviolet (EUV) projection lithography. This work may lead to an enhanced US industrial capability for producing optics for EUV, x-ray and, other high precision applications. LLNL benefits from developments in computer-controlled polishing and the insertion of fluid mechanics modeling into the precision manufacturing area. Our accomplishments include the numerical estimation of the hydrodynamic shear stress distribution for a new polishing tool that directs and controls ... continued below

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36 p.; Other: FDE: PDF; PL:

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Taylor, J.S.; Piscotty, M. A.; Nguyen, N.Q.; Landram, C.S. & Ng, L.C. April 15, 1997.

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Description

The objectives of this project are to develop, evaluate, and optimize novel designs for a polishing tool intended for ultra-precise figure corrections on aspheric optics with tolerances typical of those required for use in extreme ultraviolet (EUV) projection lithography. This work may lead to an enhanced US industrial capability for producing optics for EUV, x-ray and, other high precision applications. LLNL benefits from developments in computer-controlled polishing and the insertion of fluid mechanics modeling into the precision manufacturing area. Our accomplishments include the numerical estimation of the hydrodynamic shear stress distribution for a new polishing tool that directs and controls the interaction of an abrasive slurry with an optical surface. A key milestone is in establishing a correlation between the shear stress predicted using our fluid mechanics model and the observed removal footprint created by a prototype tool. In addition, we demonstrate the ability to remove 25 nm layers of optical glass in a manner qualitatively similar to macroscopic milling operations using a numerically- controlled machine tool. Other accomplishments include the development of computer control software for directing the polishing tool and the construction of a polishing testbed.

Physical Description

36 p.; Other: FDE: PDF; PL:

Notes

OSTI as DE98051054

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  • Other Information: PBD: 15 Apr 1997

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  • Other: DE98051054
  • Report No.: UCRL-ID--127008
  • Grant Number: W-7405-ENG-48
  • DOI: 10.2172/591787 | External Link
  • Office of Scientific & Technical Information Report Number: 591787
  • Archival Resource Key: ark:/67531/metadc689975

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • April 15, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • Feb. 16, 2016, 6:37 p.m.

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Taylor, J.S.; Piscotty, M. A.; Nguyen, N.Q.; Landram, C.S. & Ng, L.C. Efficient polishing of aspheric optics, report, April 15, 1997; California. (digital.library.unt.edu/ark:/67531/metadc689975/: accessed December 9, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.