Dynamic effects of linkage joints in electrostatic microengines

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Description

The electrostatic micro-engine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must be fully understood. One of the major trade-offs in the micro-engine design is the use of either pin or flexure joints. This paper will develop the equations of motion for flexure-jointed and pin-jointed surface micromachined microengines. An analytical mechanics approach will be used to derive the equations of motion and the appropriate equations of constraint. The effect of the flexure joints on the drive signals ... continued below

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6 p.

Creation Information

Allen, J.J.; Miller, S.L. & LaVigne, G.F. May 1, 1998.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

The electrostatic micro-engine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must be fully understood. One of the major trade-offs in the micro-engine design is the use of either pin or flexure joints. This paper will develop the equations of motion for flexure-jointed and pin-jointed surface micromachined microengines. An analytical mechanics approach will be used to derive the equations of motion and the appropriate equations of constraint. The effect of the flexure joints on the drive signals of the micro engine is experimentally shown to be significant during static tests.

Physical Description

6 p.

Notes

OSTI as DE98004906

Source

  • Conference on modeling and simulation of microsystems, semiconductors, sensors and actuators, Santa Clara, CA (United States), 6-8 Apr 1998

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  • Other: DE98004906
  • Report No.: SAND--97-2821C
  • Report No.: CONF-980430--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 594448
  • Archival Resource Key: ark:/67531/metadc689929

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Office of Scientific & Technical Information Technical Reports

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  • May 1, 1998

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • April 13, 2016, 1:36 p.m.

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Allen, J.J.; Miller, S.L. & LaVigne, G.F. Dynamic effects of linkage joints in electrostatic microengines, article, May 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc689929/: accessed December 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.