Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components

PDF Version Also Available for Download.

Description

This report summarizes a three year effort to develop an automated microassembly workcell for the assembly of LIGA (Lithography Galvonoforming Abforming) parts. Over the last several years, Sandia has developed processes for producing surface machined silicon and LIGA parts for use in weapons surety devices. Some of these parts have outside dimensions as small as 100 micron, and most all have submicron tolerances. Parts this small and precise are extremely difficult to assembly by hand. Therefore, in this project, we investigated the technologies required to develop a robotic workcell to assembly these parts. In particular, we concentrated on micro-grippers, visual ... continued below

Physical Description

Medium: P; Size: 77 pages

Creation Information

Feddema, J.T.; Simon, R.; Polosky, M. & Christenson, T. April 1, 1999.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 36 times . More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Sponsor

Publisher

  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

This report summarizes a three year effort to develop an automated microassembly workcell for the assembly of LIGA (Lithography Galvonoforming Abforming) parts. Over the last several years, Sandia has developed processes for producing surface machined silicon and LIGA parts for use in weapons surety devices. Some of these parts have outside dimensions as small as 100 micron, and most all have submicron tolerances. Parts this small and precise are extremely difficult to assembly by hand. Therefore, in this project, we investigated the technologies required to develop a robotic workcell to assembly these parts. In particular, we concentrated on micro-grippers, visual servoing, micro-assembly planning, and parallel assembly. Three different micro-grippers were tested: a pneumatic probe, a thermally actuated polysilicon tweezer, and a LIGA fabricated tweezer. Visual servoing was used to accuracy position two parts relative to one another. Fourier optics methods were used to generate synthetic microscope images from CAD drawings. These synthetic images are used off-line to test image processing routines under varying magnifications and depths of field. They also provide reference image features which are used to visually servo the part to the desired position. We also investigated a new aspect of fine motion planning for the micro-domain. As parts approach 1-10 {micro}m or less in outside dimensions, interactive forces such as van der Waals and electrostatic forces become major factors which greatly change the assembly sequence and path plans. We developed the mathematics required to determine the goal regions for pick up, holding, and release of a micro-sphere being handled by a rectangular tool. Finally, we implemented and tested the ability to assemble an array of LIGA parts attached to two 3 inch diameter wafers. In this way, hundreds of parts can be assembled in parallel rather than assembling each part individually.

Physical Description

Medium: P; Size: 77 pages

Notes

OSTI as DE00005833

Source

  • Other Information: PBD: 1 Apr 1999

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Report No.: SAND99-0746
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/5833 | External Link
  • Office of Scientific & Technical Information Report Number: 5833
  • Archival Resource Key: ark:/67531/metadc689735

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this report?

When

Dates and time periods associated with this report.

Creation Date

  • April 1, 1999

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

Description Last Updated

  • April 12, 2016, 7:01 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 2
Total Uses: 36

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Feddema, J.T.; Simon, R.; Polosky, M. & Christenson, T. Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components, report, April 1, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc689735/: accessed June 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.