Non-convex profile evolution in two dimensions using volume of fluids

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Description

A new Volume of Fluid (VoF) method is applied to the problem of surface evolution in two dimensions (2D). The VoF technique is applied to problems that are representative of those that arise in semiconductor manufacturing, specifically photolithography and ion-milling. The types of surface motion considered are those whose etch rates vary as a function of both surface position and orientation. Functionality is demonstrated for etch rates that are non-convex in regard to surface orientation. A new method of computing surface curvature using divided differences of the volume fractions is also introduced, and applied to the advancement of surfaces as ... continued below

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35 p.

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Helmsen, J.; Colella, P. & Puckett, E.G. June 1, 1997.

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Description

A new Volume of Fluid (VoF) method is applied to the problem of surface evolution in two dimensions (2D). The VoF technique is applied to problems that are representative of those that arise in semiconductor manufacturing, specifically photolithography and ion-milling. The types of surface motion considered are those whose etch rates vary as a function of both surface position and orientation. Functionality is demonstrated for etch rates that are non-convex in regard to surface orientation. A new method of computing surface curvature using divided differences of the volume fractions is also introduced, and applied to the advancement of surfaces as a vanishing diffusive term.

Physical Description

35 p.

Notes

OSTI as DE98000157

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  • Other Information: PBD: Jun 1997

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  • Other: DE98000157
  • Report No.: LBNL--40693
  • Grant Number: AC03-76SF00098
  • DOI: 10.2172/539515 | External Link
  • Office of Scientific & Technical Information Report Number: 539515
  • Archival Resource Key: ark:/67531/metadc689707

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  • June 1, 1997

Added to The UNT Digital Library

  • Aug. 14, 2015, 8:43 a.m.

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  • April 5, 2016, 10:23 a.m.

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Helmsen, J.; Colella, P. & Puckett, E.G. Non-convex profile evolution in two dimensions using volume of fluids, report, June 1, 1997; California. (digital.library.unt.edu/ark:/67531/metadc689707/: accessed August 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.