A 3-axis force balanced accelerometer using a single proof-mass

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Description

This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time multiplexing. Proof of concept is experimentally demonstrated with a single-mass monolithic surface micromachined 3-axis accelerometer.

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5 p.

Creation Information

Lemkin, M.A.; Boser, B.E.; Auslander, D. & Smith, J. April 1997.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 48 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time multiplexing. Proof of concept is experimentally demonstrated with a single-mass monolithic surface micromachined 3-axis accelerometer.

Physical Description

5 p.

Notes

OSTI as DE97004537

Source

  • 9. international conference on solid-state sensors and actuators, Chicago, IL (United States), 16-19 Jun 1997

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  • Other: DE97004537
  • Report No.: SAND--97-0764C
  • Report No.: CONF-970646--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 471355
  • Archival Resource Key: ark:/67531/metadc687321

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Creation Date

  • April 1997

Added to The UNT Digital Library

  • July 25, 2015, 2:21 a.m.

Description Last Updated

  • Dec. 4, 2015, 9:29 p.m.

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Lemkin, M.A.; Boser, B.E.; Auslander, D. & Smith, J. A 3-axis force balanced accelerometer using a single proof-mass, article, April 1997; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc687321/: accessed August 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.