A low power, tight seal, polyimide electrostatic microvalve Metadata

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  • Main Title A low power, tight seal, polyimide electrostatic microvalve


  • Author: Lee, A.P.
    Creator Type: Personal
  • Author: Hamilton, J.
    Creator Type: Personal
  • Author: Trevino, J.
    Creator Type: Personal


  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: USDOE, Washington, DC (United States)


  • Name: Lawrence Livermore National Laboratory
    Place of Publication: California
    Additional Info: Lawrence Livermore National Lab., CA (United States)


  • Creation: 1996-04-17


  • English


  • Content Description: An electrostatically-actuated polyimide microvalve is developed with sub-micron gaps between the electrodes to provide high force with low power consumption (< 1 mW). Built-in residual stress results in a curled bimorph cantilever which allows for a n-Licroactuator with large displacement. This microactuator is used to open and close a fluid path hole etched in silicon for a microvalve. The microactuator can be actuated with 25V for a displacement of 200 {mu}m. The cantilever actuator is mainly composed of polyimide, which is flexible enough to conform over the flow hole, thereby eliminating the need for the design of a valve seat.
  • Physical Description: 9 p.


  • Keyword: Control Systems
  • Keyword: Mechanical Properties
  • Keyword: Electrodes
  • Keyword: Leakage Current
  • Keyword: Imides
  • STI Subject Categories: 44 Instrumentation, Including Nuclear And Particle Detectors
  • Keyword: Organic Polymers
  • Keyword: Design
  • Keyword: Residual Stresses
  • Keyword: Actuators
  • STI Subject Categories: 36 Materials Science
  • Keyword: Valves


  • Conference: 1996 international mechanical engineering congress and exhibition, Atlanta, GA (United States), 17-22 Nov 1996


  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI


  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article


  • Text


  • Other: DE96014046
  • Report No.: UCRL-JC--123423
  • Report No.: CONF-961105--10
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 385587
  • Archival Resource Key: ark:/67531/metadc686540


  • Display Note: OSTI as DE96014046