A low power, tight seal, polyimide electrostatic microvalve Page: 5 of 10
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cantilever, electrostatic force flattens the cantilever onto the substrate, and the flow path
hole is sealed up.
C VS Fe A (b)
FIGURE 1. Schematic of operation principle of polyimide electrostatic
microvalve (a) microvalve in open configuration with voltage supply open (b)
microvalve closed by applying voltage to generate electrostatic attraction force. (c)
top view illustrating areas for flow pressure through hole and area of electrostatic
force. (d) layout of material layers.
IMECE 1996 paper
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Lee, A.P.; Hamilton, J. & Trevino, J. A low power, tight seal, polyimide electrostatic microvalve, article, April 17, 1996; California. (https://digital.library.unt.edu/ark:/67531/metadc686540/m1/5/: accessed March 25, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.