A low power, tight seal, polyimide electrostatic microvalve Page: 1 of 10
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UCRL-JC-123423
PREPRINT
COTF-9 //y Eer-/
A Low Power, Tight Seal, Polyimide Electrostatic MicrovalveJUL2 2cSG
Abraham P. Lee
Julie Hamilton
Jimmy TrevinoOSTI
This paper was prepared for submittal to the
1996 International Mechanical Engineering Congress & Exposition
Atlanta, GA
November 17-22,1996
April 17,1996
This isa preprint of a paper intended for publication in a journal or proceedings. Since
changes may be made before publication, this preprint is made available with the
understanding that it will not be cited or reproduced without the permission of the
author.OF 'Is ocuMET IS UNLMITED
MASTER
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Lee, A.P.; Hamilton, J. & Trevino, J. A low power, tight seal, polyimide electrostatic microvalve, article, April 17, 1996; California. (https://digital.library.unt.edu/ark:/67531/metadc686540/m1/1/?rotate=90: accessed April 19, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.