A low power, tight seal, polyimide electrostatic microvalve Page: 1 of 10
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COTF-9 //y Eer-/
A Low Power, Tight Seal, Polyimide Electrostatic Microvalve
Abraham P. Lee
This paper was prepared for submittal to the
1996 International Mechanical Engineering Congress & Exposition
This isa preprint of a paper intended for publication in a journal or proceedings. Since
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understanding that it will not be cited or reproduced without the permission of the
OF 'Is ocuMET IS UNLMITED
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Lee, A.P.; Hamilton, J. & Trevino, J. A low power, tight seal, polyimide electrostatic microvalve, article, April 17, 1996; California. (digital.library.unt.edu/ark:/67531/metadc686540/m1/1/: accessed November 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.