A low power, tight seal, polyimide electrostatic microvalve Page: 1 of 10
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COTF-9 //y Eer-/
A Low Power, Tight Seal, Polyimide Electrostatic Microvalve
Abraham P. Lee
This paper was prepared for submittal to the
1996 International Mechanical Engineering Congress & Exposition
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changes may be made before publication, this preprint is made available with the
understanding that it will not be cited or reproduced without the permission of the
OF 'Is ocuMET IS UNLMITED
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Lee, A.P.; Hamilton, J. & Trevino, J. A low power, tight seal, polyimide electrostatic microvalve, article, April 17, 1996; California. (digital.library.unt.edu/ark:/67531/metadc686540/m1/1/: accessed September 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.