S-shaped magnetic macroparticle filter for cathodic arc deposition

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Description

A new magnetic macroparticle filter design consisting of two 90{sup o} filters forming an S-shape is described. Transport properties of this S-filter are investigated using Langmuir and deposition probes. It is shown that filter efficiency is product of the efficiencies of two 90{sup o} filters and the deposition rate is still acceptably high to perform thin film deposition. Films of amorphous hard carbon have been deposited using a 90{sup o} filter and the S-filter, and macroparticle content of the films are compared.

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11 pages

Creation Information

Anders, S.; Anders, A.; Dickinson, M.R.; MacGill, R.A. & Brown, I.G. April 1996.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 83 times . More information about this report can be viewed below.

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Description

A new magnetic macroparticle filter design consisting of two 90{sup o} filters forming an S-shape is described. Transport properties of this S-filter are investigated using Langmuir and deposition probes. It is shown that filter efficiency is product of the efficiencies of two 90{sup o} filters and the deposition rate is still acceptably high to perform thin film deposition. Films of amorphous hard carbon have been deposited using a 90{sup o} filter and the S-filter, and macroparticle content of the films are compared.

Physical Description

11 pages

Notes

INIS; OSTI as DE00409856

Source

  • Other Information: Supercedes report TI97000929; PBD: Apr 1996

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  • Other: TI97000929
  • Report No.: LBL--37949
  • Report No.: CONF-960723--6
  • Report No.: LBNL/ALS--798
  • Grant Number: AC03-76SF00098
  • DOI: 10.2172/409856 | External Link
  • Office of Scientific & Technical Information Report Number: 409856
  • Archival Resource Key: ark:/67531/metadc686476

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • April 1996

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • Oct. 3, 2017, 6:56 p.m.

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Anders, S.; Anders, A.; Dickinson, M.R.; MacGill, R.A. & Brown, I.G. S-shaped magnetic macroparticle filter for cathodic arc deposition, report, April 1996; California. (digital.library.unt.edu/ark:/67531/metadc686476/: accessed November 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.