Performance of a two-mirror, four-reflection, ring-field optical system at {lambda}=13 nm

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Performance of an Extreme Ultraviolet Lithography (EUVL) imaging optic was characterized by printing resolution test images in resist. While features as small as 0.137 {mu}m were successfully printed, a resolution of 0.175 {mu}m better represents the performance of the system over the full 0.9 mm{sup 2} image field. The contrast of the aerial image was estimated to be about 40% or less for the fine features printed. This low contrast value is attributed to a degradation of the modulation transfer function due to presence of scattered light in the image.

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8 p.

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La Fontaine, B.; Gaines, D.P.; Kania, D.R.; Sommargren, G.E.; Baker, S.L. & Ciarlo, D. May 24, 1996.

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Description

Performance of an Extreme Ultraviolet Lithography (EUVL) imaging optic was characterized by printing resolution test images in resist. While features as small as 0.137 {mu}m were successfully printed, a resolution of 0.175 {mu}m better represents the performance of the system over the full 0.9 mm{sup 2} image field. The contrast of the aerial image was estimated to be about 40% or less for the fine features printed. This low contrast value is attributed to a degradation of the modulation transfer function due to presence of scattered light in the image.

Physical Description

8 p.

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OSTI as DE96013883

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  • Optical Society of America (OSA) meeting on integrated photonics research, Boston, MA (United States), 29 Apr - 3 May 1996

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  • Other: DE96013883
  • Report No.: UCRL-JC--123013
  • Report No.: CONF-960493--17
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 372658
  • Archival Resource Key: ark:/67531/metadc684596

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Office of Scientific & Technical Information Technical Reports

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  • May 24, 1996

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  • July 25, 2015, 2:20 a.m.

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  • Feb. 17, 2016, 3:18 p.m.

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La Fontaine, B.; Gaines, D.P.; Kania, D.R.; Sommargren, G.E.; Baker, S.L. & Ciarlo, D. Performance of a two-mirror, four-reflection, ring-field optical system at {lambda}=13 nm, article, May 24, 1996; California. (digital.library.unt.edu/ark:/67531/metadc684596/: accessed November 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.