Thin-film characterization and flaw detection. Final report, February 1, 1993--November 31, 1997

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The objectives were to determine the elastic constants of thin films deposited on substrates, to measure residual stress and to detect and characterize defects in thin film substrate configurations. There are many present and potential applications of configurations consisting of a thin film deposited on a substrate. Thin films that are deposited to improve the hardness and/or the thermal properties of surfaces were of principal interest in this work. Thin film technology does, however, also include high {Tc} superconductor films, films for magnetic recording, superlattices and films for band-gap engineering and quantum devices. The studies that were carried out on ... continued below

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8 p.

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Achenbach, J.D. February 25, 1998.

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Description

The objectives were to determine the elastic constants of thin films deposited on substrates, to measure residual stress and to detect and characterize defects in thin film substrate configurations. There are many present and potential applications of configurations consisting of a thin film deposited on a substrate. Thin films that are deposited to improve the hardness and/or the thermal properties of surfaces were of principal interest in this work. Thin film technology does, however, also include high {Tc} superconductor films, films for magnetic recording, superlattices and films for band-gap engineering and quantum devices. The studies that were carried out on this project also have relevance to these applications. Both the film and the substrate are generally anisotropic. A line-focus acoustic microscope has been used to measure the speed of surface acoustic waves (SAW) in the thin film/substrate system. This microscope has unique advantages for measurements in anisotropic media. Analytical and numerical techniques have been employed to extract the desired information on the thin film from the measured SAW data. Results include: (1) analytical and numerical techniques for the direct problem and for inverse methods; (2) measurements of homogeneous and superlattice film constants; (3) investigation of the effect of surface roughness and (4) measurements of residual stresses.

Physical Description

8 p.

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OSTI as DE99003203

Medium: P; Size: 8 p.

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  • Other Information: PBD: 25 Feb 1998

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  • Other: DE99003203
  • Report No.: DOE/ER/13484--001
  • Grant Number: FG02-86ER13484
  • DOI: 10.2172/354989 | External Link
  • Office of Scientific & Technical Information Report Number: 354989
  • Archival Resource Key: ark:/67531/metadc684187

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • February 25, 1998

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • April 13, 2017, 2:05 p.m.

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Achenbach, J.D. Thin-film characterization and flaw detection. Final report, February 1, 1993--November 31, 1997, report, February 25, 1998; United States. (digital.library.unt.edu/ark:/67531/metadc684187/: accessed November 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.