Significance of microstructure for a MOCVD-grown YSZ thin film gas sensor

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Description

The authors report the fabrication and characterization of a low temperature (200--400 C) thin film gas sensor constructed from a MOCVD-grown yttria-stabilized zirconia (YSZ) layer sandwiched between two platinum thin film electrodes. A reproducible gas-sensing response is produced by applying a cyclic voltage which generates voltammograms with gas-specific current peaks and shapes. Growth conditions are optimized for preparing YSZ films having dense microstructures, low leakage currents, and maximum ion conductivities. In particular, the effect of growth temperature on film morphology and texture is discussed and related to the electrical and gas-sensing properties of the thin film sensor device.

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6 p.

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Vetrone, J.; Foster, C. & Bai, G. November 1, 1996.

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Description

The authors report the fabrication and characterization of a low temperature (200--400 C) thin film gas sensor constructed from a MOCVD-grown yttria-stabilized zirconia (YSZ) layer sandwiched between two platinum thin film electrodes. A reproducible gas-sensing response is produced by applying a cyclic voltage which generates voltammograms with gas-specific current peaks and shapes. Growth conditions are optimized for preparing YSZ films having dense microstructures, low leakage currents, and maximum ion conductivities. In particular, the effect of growth temperature on film morphology and texture is discussed and related to the electrical and gas-sensing properties of the thin film sensor device.

Physical Description

6 p.

Notes

OSTI as DE97001224

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  • Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995

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  • Other: DE97001224
  • Report No.: ANL/MSD/CP--86864
  • Report No.: CONF-951155--124
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 432890
  • Archival Resource Key: ark:/67531/metadc684140

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  • November 1, 1996

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • Dec. 14, 2015, 6:43 p.m.

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Vetrone, J.; Foster, C. & Bai, G. Significance of microstructure for a MOCVD-grown YSZ thin film gas sensor, article, November 1, 1996; Illinois. (digital.library.unt.edu/ark:/67531/metadc684140/: accessed September 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.