High-performance RF coil inductors on silicon

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Description

Strong demand for wireless communication devices has motivated research directed toward monolithic integration of transceivers. The fundamental electronic component least compatible with silicon integrated circuits is the inductor, although a number of inductors are required to implement oscillators, filters and matching networks in cellular devices. Spiral inductors have been integrated into the silicon IC metallization sequence but have not performed adequately due to coupling to the silicon which results in parasitic capacitance and loss. We have, for the first time, fabricated three dimensional coil inductors on silicon which have significantly lower capacitive coupling and loss and which now exceed the ... continued below

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8 p.

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Malba, V.; Young, D.; Ou, J.J.; Bernhardt, A.F. & Boser, B.E. March 1, 1998.

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Description

Strong demand for wireless communication devices has motivated research directed toward monolithic integration of transceivers. The fundamental electronic component least compatible with silicon integrated circuits is the inductor, although a number of inductors are required to implement oscillators, filters and matching networks in cellular devices. Spiral inductors have been integrated into the silicon IC metallization sequence but have not performed adequately due to coupling to the silicon which results in parasitic capacitance and loss. We have, for the first time, fabricated three dimensional coil inductors on silicon which have significantly lower capacitive coupling and loss and which now exceed the requirements of potential applications. Quality factors of 30 at 1 GHz have been measured in single turn devices and Q > 16 in 2 and 4 turn devices. The reduced Q for multiturn devices appears to be related to eddy currents in outer turns generated by magnetic fields from current in neighboring turns. Higher Q values significantly in excess of 30 are anticipated using modified coil designs.

Physical Description

8 p.

Notes

OSTI as DE98057705

Other: FDE: PDF; PL:

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  • 48. Electronic component and technology (ECTC) conference, Seattle, WA (United States), 25-28 May 1998

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  • Other: DE98057705
  • Report No.: UCRL-JC--129936
  • Report No.: CONF-980550--
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 304603
  • Archival Resource Key: ark:/67531/metadc684031

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Office of Scientific & Technical Information Technical Reports

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  • March 1, 1998

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  • July 25, 2015, 2:20 a.m.

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  • April 6, 2017, 6:12 p.m.

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Malba, V.; Young, D.; Ou, J.J.; Bernhardt, A.F. & Boser, B.E. High-performance RF coil inductors on silicon, article, March 1, 1998; California. (digital.library.unt.edu/ark:/67531/metadc684031/: accessed December 10, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.