Finite Element Modeling of a Microhotplate for Microfluidic Applications

PDF Version Also Available for Download.

Description

A hand-held chemical laboratory ({mu}ChemLab) is being developed that utilizes a silicon- nitride-supported microhotplate in the front-end, gas sampling and preconcentration stage. Device constraints include low-power (<200mW at 5V), rapid heating (<20msec), and a relatively uniform temperature distribution throughout the heated area ({approximately}3mm{sup 2}). To optimize for these criteria, the electro-thermal behavior of the microhotplate was modeled using Thermal Analysis System (TAS). Predicted steady-state and transient behavior agree well with infrared (IR) microscope data and measured transient response for a low-stress silicon nitride thermal conductivity of k{sub n} = 6.4 x 10{sup {minus}2} W x (cm x {degree}C){sup {minus}1} and ... continued below

Physical Description

6 p.

Creation Information

Benson, D.A.; Frye-Mason, G.C.; Manginell, R.P. & Rosato, D.A. March 9, 1999.

Context

This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

Who

People and organizations associated with either the creation of this article or its content.

Sponsor

Publisher

  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this article. Follow the links below to find similar items on the Digital Library.

Description

A hand-held chemical laboratory ({mu}ChemLab) is being developed that utilizes a silicon- nitride-supported microhotplate in the front-end, gas sampling and preconcentration stage. Device constraints include low-power (<200mW at 5V), rapid heating (<20msec), and a relatively uniform temperature distribution throughout the heated area ({approximately}3mm{sup 2}). To optimize for these criteria, the electro-thermal behavior of the microhotplate was modeled using Thermal Analysis System (TAS). Predicted steady-state and transient behavior agree well with infrared (IR) microscope data and measured transient response for a low-stress silicon nitride thermal conductivity of k{sub n} = 6.4 x 10{sup {minus}2} W x (cm x {degree}C){sup {minus}1} and a convection coefficient of h{sub cv} = 3.5 x 10{sup {minus}3} W x (cm{sup 2} x {degree}C){sup {minus}1}. The magnitude of h{sub cv} is framed in the context of vacuum measurements and empirical data. Details and limitations of the IR measurement are discussed. Finally, the efficacy of methods for reducing thermal gradients in the microhotplate's active area is presented.

Physical Description

6 p.

Notes

OSTI as DE00004272

Medium: P; Size: 6 pages

Source

  • Modeling and Simulation of Microsystems (MSM '99), San Juan (PR), 04/19/1999--04/21/1999

Language

Item Type

Identifier

Unique identifying numbers for this article in the Digital Library or other systems.

  • Report No.: SAND99-0576C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 4272
  • Archival Resource Key: ark:/67531/metadc683851

Collections

This article is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this article?

When

Dates and time periods associated with this article.

Creation Date

  • March 9, 1999

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

Description Last Updated

  • April 11, 2017, 1:06 p.m.

Usage Statistics

When was this article last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 4

Interact With This Article

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

Citations, Rights, Re-Use

Benson, D.A.; Frye-Mason, G.C.; Manginell, R.P. & Rosato, D.A. Finite Element Modeling of a Microhotplate for Microfluidic Applications, article, March 9, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc683851/: accessed October 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.