MEMS: A new approach to micro-optics

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Description

MicroElectroMechanical Systems (MEMS) and their fabrication technologies provide great opportunities for application to micro-optical systems (MOEMS). Implementing MOEMS technology ranges from simple, passive components to complicated, active systems. Here, an overview of polysilicon surface micromachining MEMS combined with optics is presented. Recent advancements to the technology, which may enhance its appeal for micro-optics applications are emphasized. Of all the MEMS fabrication technologies, polysilicon surface micromachining technology has the greatest basis in and leverages the most the infrastructure for silicon integrated circuit fabrication. In that respect, it provides the potential for very large volume, inexpensive production of MOEMS. This paper highlights ... continued below

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8 p.

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Sniegowski, J.J. December 31, 1997.

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Description

MicroElectroMechanical Systems (MEMS) and their fabrication technologies provide great opportunities for application to micro-optical systems (MOEMS). Implementing MOEMS technology ranges from simple, passive components to complicated, active systems. Here, an overview of polysilicon surface micromachining MEMS combined with optics is presented. Recent advancements to the technology, which may enhance its appeal for micro-optics applications are emphasized. Of all the MEMS fabrication technologies, polysilicon surface micromachining technology has the greatest basis in and leverages the most the infrastructure for silicon integrated circuit fabrication. In that respect, it provides the potential for very large volume, inexpensive production of MOEMS. This paper highlights polysilicon surface micromachining technology in regards to its capability to provide both passive and active mechanical elements with quality optical elements.

Physical Description

8 p.

Notes

OSTI as DE98004024

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  • MOEMS `97: international conference on optical MEMS and their applications, Nara (Japan), 18 Nov 1997

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  • Other: DE98004024
  • Report No.: SAND--97-2641C
  • Report No.: CONF-971192--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 292834
  • Archival Resource Key: ark:/67531/metadc683689

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • December 31, 1997

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  • July 25, 2015, 2:20 a.m.

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  • Nov. 24, 2015, 12:14 p.m.

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Sniegowski, J.J. MEMS: A new approach to micro-optics, article, December 31, 1997; United States. (digital.library.unt.edu/ark:/67531/metadc683689/: accessed November 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.