A micromachined surface acoustic wave sensor for detecting inert gases Page: 1 of 7
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ANL/ET/Crc -9037L
DEC 0 6 1996
0STIA Micromachined Surface Acoustic Wave Sensor for Detecting Inert
Gases*
by
S. Ahuja, M. Hersam, C. Ross, H. T. Chien, and A. C. Raptis
Energy Technology Division
Argonne National Laboratory
Argonne IL 60439
MASTER
The submitted manuscript has been authored by a
contractor of the U. S. Government under contract No. W-
31-109-ENG-38. Accordingly, the U. S. Government
retains a nonexclusive, royalty-free license to publish or
reproduce the published. form of this contribution, or
allow others to do so, for U. S. Government purposes.
DUSTRiBUTION OF THIS DOCUMENT IS UNLIMITI
Paper to be published in the 1996 IEEE International Ultrasonics Symposium Proceedings, Nov. 3-6,
1996, San Antonio, Texas.
*Work supported by the U.S. Department of Energy, Energy Efficiency and Renewable Energy, Office of
Industrial Technologies, under Contract W-31-109-ENG-38.
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Ahuja, S.; Hersam, M.; Ross, C.; Chien, H. T. & Raptis, A. C. A micromachined surface acoustic wave sensor for detecting inert gases, article, December 31, 1996; Illinois. (https://digital.library.unt.edu/ark:/67531/metadc682509/m1/1/: accessed April 25, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.