A micromachined surface acoustic wave sensor for detecting inert gases

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Surface acoustic wave (SAW) sensors must be specifically designed for each application because many variables directly affect the acoustic wave velocity. In the present work, the authors have designed, fabricated, and tested an SAW sensor for detection of metastable states of He. The sensor consists of two sets of micromachined interdigitated transducers (IDTs) and delay lines fabricated by photolithography on a single Y-cut LiNbO{sub 3} substrate oriented for Z-propagation of the SAWs. One set is used as a reference and the other set employs a delay line coated with a titanium-based thin film sensitive to electrical conductivity changes when exposed ... continued below

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6 p.

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Ahuja, S.; Hersam, M.; Ross, C.; Chien, H.T. & Raptis, A.C. December 31, 1996.

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Description

Surface acoustic wave (SAW) sensors must be specifically designed for each application because many variables directly affect the acoustic wave velocity. In the present work, the authors have designed, fabricated, and tested an SAW sensor for detection of metastable states of He. The sensor consists of two sets of micromachined interdigitated transducers (IDTs) and delay lines fabricated by photolithography on a single Y-cut LiNbO{sub 3} substrate oriented for Z-propagation of the SAWs. One set is used as a reference and the other set employs a delay line coated with a titanium-based thin film sensitive to electrical conductivity changes when exposed to metastable states of He. The reference sensor is used to obtain a true frequency translation in relation to a voltage controlled oscillator. An operating frequency of 109 MHz has been used, and the IDT finger width is 8 {micro}m. Variation in electrical conductivity of the thin film at the delay line due to exposure to He is detected as a frequency shift in the assembly, which is then used as a measure of the amount of metastable He exposed to the sensing film on the SAW delay line. A variation in the He pressure versus frequency shifts indicates the extent of the metastable He interaction.

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6 p.

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OSTI as DE97000928

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  • Ultrasonics symposium, San Antonio, TX (United States), 3-6 Nov 1996

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  • Other: DE97000928
  • Report No.: ANL/ET/CP--90372
  • Report No.: CONF-9611113--2
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 432889
  • Archival Resource Key: ark:/67531/metadc682509

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  • December 31, 1996

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  • July 25, 2015, 2:20 a.m.

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  • Dec. 14, 2015, 6:40 p.m.

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Ahuja, S.; Hersam, M.; Ross, C.; Chien, H.T. & Raptis, A.C. A micromachined surface acoustic wave sensor for detecting inert gases, article, December 31, 1996; Illinois. (digital.library.unt.edu/ark:/67531/metadc682509/: accessed July 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.