Industrial process driven system requirements for PSII applications

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Description

Plasma Source Ion Implantation (PSII) is a room temperature, plasma-based surface enhancement technology which is being commercialized through the efforts of a group of companies. A number of issues are critical to the successful design and operation of a commercial PSII system. These include overall vacuum system design, plasma source requirements and plasma-target interaction considerations, pulsed, high voltage sub-system (typically referred to as modulator) requirements, and target requirements and limitations. Critical system components are outlined and overall system design will be briefly covered.

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16 p.

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Munson, C.P. October 1, 1997.

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Description

Plasma Source Ion Implantation (PSII) is a room temperature, plasma-based surface enhancement technology which is being commercialized through the efforts of a group of companies. A number of issues are critical to the successful design and operation of a commercial PSII system. These include overall vacuum system design, plasma source requirements and plasma-target interaction considerations, pulsed, high voltage sub-system (typically referred to as modulator) requirements, and target requirements and limitations. Critical system components are outlined and overall system design will be briefly covered.

Physical Description

16 p.

Notes

OSTI as DE98003008

Source

  • ATP Motor Vehicle Manufacturing Technology (MVMT) conference, Ann Arbor, MI (United States), 28-29 Oct 1997

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  • Other: DE98003008
  • Report No.: LA-UR--97-4067
  • Report No.: CONF-9710151--
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 292866
  • Archival Resource Key: ark:/67531/metadc682491

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • October 1, 1997

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

Description Last Updated

  • Feb. 25, 2016, 7:44 p.m.

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Munson, C.P. Industrial process driven system requirements for PSII applications, article, October 1, 1997; New Mexico. (digital.library.unt.edu/ark:/67531/metadc682491/: accessed November 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.